Line Spacing Measurement Method Based on Image Processing

Table 1. Measurement values of two algorithms
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Table 1. Measurement values of two algorithms
Nominalvalue /μm Linear approximationalgorithm /μm Line spacingmeasurementalgorithm /μm
0.1 0.0989 0.0990
0.2 0.1989 0.1991
0.5 0.4977 0.4987
1 0.9999 1.0005
2 2.0022 2.0009
5 5.0041 5.0038
10 9.9536 9.9736

Table 2. Comparison of measurement results of two algorithms

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Table 2. Comparison of measurement results of two algorithms

Nominalvalue /μm	Measurementof NMM /μm	Relative error of linearapproximation algorithm /%	Relative error of line spacingmeasurement algorithm /%
0.1	0.0993	0.403	0.302
0.2	0.1996	0.351	0.251
0.5	0.4998	0.420	0.220
1	1	0.010	0.050
2	2	0.110	0.045
5	5.003	0.022	0.016
10	9.999	0.454	0.254

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Xiaodong Zhang, Lin Zhao, Zhiguo Han, Yanan Feng, Suoyin Li. Line Spacing Measurement Method Based on Image Processing[J]. Laser & Optoelectronics Progress, 2020, 57(1): 011201

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