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Piezoelectrics & Acoustooptics, Volume. 44, Issue 1, 42(2022)

Analysis of Deflection Angle of Piezoelectric Micromirror Plate with Large Deflection

DU Yongfei1, MENG Jiang1, FAN Wei1, LIU Kai1, JIANG Tong1, and AN Kun2
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    DU Yongfei, MENG Jiang, FAN Wei, LIU Kai, JIANG Tong, AN Kun. Analysis of Deflection Angle of Piezoelectric Micromirror Plate with Large Deflection[J]. Piezoelectrics & Acoustooptics, 2022, 44(1): 42

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    Paper Information

    Received: Oct. 20, 2021

    Accepted: --

    Published Online: Mar. 16, 2022

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.01.009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology