Recent progress of second harmonic generation based on thin film lithium niobate [Invited]

Yang Li; Zhijin Huang; Wentao Qiu; Jiangli Dong; Heyuan Guan; Huihui Lu

doi:10.3788/COL202119.060012

Chinese Optics Letters, Volume. 19, Issue 6, 060012(2021)

Recent progress of second harmonic generation based on thin film lithium niobate [Invited]

Yang Li¹, Zhijin Huang¹, Wentao Qiu¹, Jiangli Dong², Heyuan Guan^2、*, and Huihui Lu^1、**

¹Guangdong Provincial Key Laboratory of Optical Fiber Sensing and Communications, Jinan University, Guangzhou 510632, China

²Key Laboratory of Optoelectronic Information and Sensing Technologies of Guangdong Higher Education Institutes, Jinan University, Guangzhou 510632, China

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Fig. 1. Summary of different approaches of SHG based on TFLN technology.

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Fig. 2. (a) Schematic and false-color SEM image of a periodically poled nanophotonic waveguide^[39]; Copyright 2018, Optical Society of America. (b) SH confocal microscopy of the PPLN thin film fabricated by microelectrode poling and the cross section of the LNOI ridge waveguide^[40]; Copyright 2020, AIP Publishing. (c) Schematic of the cascading EO coupling and SHG process in the PPLN ridge waveguide^[41]; Copyright 2019, Optical Society of America. (d) Schematic illustration of the PPLN waveguide with poling electrodes^[42]; Copyright 2019, Optical Society of America.

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Fig. 3. (a) Demonstration of efficient SHG in PPLN microring resonators^[46]; Copyright 2019, Optical Society of America. (b) Schematic of the periodically grooved structure of an LN waveguide and cross-section image of the X-cut LNOI waveguide^[44]; Copyright 2017, Optical Society of America. (c) Schematic and working principle of the metasurface-assisted LN nanophotonic waveguide^[47]; Copyright 2017, Springer Nature. (d) Schematic of a rib-loaded GA-QPM waveguide with a sinusoidal modulation of the width along with the optical mode profiles of the fundamental and SH TE modes at a grating width of 1095 nm^[45]; Copyright 2017, AIP Publishing.

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Fig. 4. (a) Schematic of the LN powder to form the cavity behavior in the SH emission at a certain pump intensity^[50]; Copyright 2019, American Physical Society. (b) SEM images of single LN nanocubes to obtain the maximal SHG^[51]; Copyright 2019, American Chemical Society.

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Fig. 5. (a) Images of SHG in an LN metasurface and SHG power depending on average power of the fundamental harmonic (FH) beam^[52]; Copyright 2020, American Chemical Society. (b) Schematic of LN nonlinear metasurfaces fabricated on an X-cut LN film residing on a fused quartz substrate. Left inset gives a typical SEM image of the cross section of the metasurface, and the right inset presents the measured second-order susceptibility of the LN film used in this study^[53]; Copyright 2021, John Wiley and Sons.

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Fig. 6. (a) SEM images showing the mask for ion-beam-enhanced etching (IBEE) (Cr/SiO₂ pillars) and measured SH enhancement factor and linear reflection spectrum of the fabricated sample^[59]; Copyright 2015, American Chemical Society. (b) Schematic of the experiment mounted using index matching oil in a typical Kretschmann geometry^[70]; Copyright 2018, Optical Society of America.

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Fig. 7. (a) Scanning-electron micrograph of LN microresonators to achieve modal dispersion^[75]; Copyright 2017, Optical Society of America. (b) SEM images of the LN microdisk PM^[77]; Copyright 2020, IOP Publishing. (c) SEM image of the X-cut LN microdisk and spectra of the pump light, the second-harmonic wave, and the third-harmonic wave. SHG conversion efficiency as a function of the in-coupled power^[78]; Copyright 2019, American Physical Society. (d) Schematic depiction of the proposed nanostructure for generating SH and nonlinear simulations^[82]; Copyright 2020, De Gruyter.

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Table 1. Comparisons of SHG Conversion Efficiency of Different TF-PPLN Waveguides

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Table 1. Comparisons of SHG Conversion Efficiency of Different TF-PPLN Waveguides

Year	TFLN Structure	Poled/Coupling Region Length L (mm)	FF Power ( $λ_{FF}$ )	Coupling Loss (dB/facet)	Waveguide Propagation Loss (dB/cm)	$η_{SH}$ ( $% W^{- 1} {cm}^{- 2}$ )	Institute
2011	Plasmonic waveguide^[60]	1	1 W (1550 nm)	–	–	1.3%	Nanjing University
2015	Nanoscale LN waveguides^[61]	0.9	737 µW (1411 nm)	–	61	6.9	Friedrich Schiller Universität Jena
2017	PE channel waveguide^[36]	3.2	1 mW (1385 nm)	–	2.5	48	Shandong University
2016	Rib-loaded SiN-PPLN^[22]	4.8	0.5 mW (1530 nm)	∼6.8	$0.3 \pm 0.2$	160	University of California
2017	Metasurface-assisted PM LN waveguide^[47]	0.019	10⁹ V/m/20 mW (1640 nm)	–	–	1660	Harvard University
2017	GA-QPM LN ridge waveguide^[45]	4.9	84 mW (1568 nm)	6.5	1	0.8	University of Central Florida
2017	Integrated TFLN waveguide^[44]	3	18.3 µW (1550 nm)	4.8	$3 \pm 0.2$	41	Harvard University
2016	Diced ridge PPLN waveguides^[62]	5.8	6.6 mW (1550 nm)	–	0.57	77.9	Shandong University
2018	PPLN on silicon^[63]	20	10 mW (1547 nm)	–	0.2	1230	University of Central Florida
2018	Nanostructured PPLN waveguide^[39]	4	220 mW (1550 nm)	∼10	–	2600	Harvard University
2018	LN nanophotonic waveguide^[64]	8	∼1 mW (1540 nm)	5	0.54	22.2	University of Rochester
2019	PPLN microrings^[46]	–	115 µW (1617 nm)	–	–	250,000%/W	Yale University
2019	PPLNOI ridge waveguide^[41]	10	10 mW (1590 nm)	–	–	0.04	Shanghai Jiao Tong University
2019	Dry-etched^[65]	0.6	1 mW (1540 nm)	6	3	4600	University of Central Florida
2019	Dry-etched^[21]	4	2.95 mW (1550 nm)	4.3	0.3	2200	Stevens Institute of Technology
2020	Z-cut PPLNOI waveguide^[66]	1	–(1550 nm)	$5.4 \pm 0.3$	$< 0.03$	2400	Stevens Institute of Technology
2020	Dry-etched PPLN^[67]	5	0.1 mW (1570 nm)	$- 7$	$- 0.54$	2000	University of California
2020	PPLNOI ridge waveguide^[40]	6	397 µW (1470 nm)	–	–	3061	Nanjing University+Sun Yat-sen University
2020	Birefringent phase-matching LN waveguide^[68]	10	4500 W (1064 nm)	–	0.58	0.87%	Shandong University
2020	Shallow-etched TFLN waveguides^[42]	5	10 mW (1560 nm)	7.7	1	3757	University of California
2020	PPLN waveguide^[69]	6	60 fJ (2050 nm)	–	$< 0.1$	1000	Stanford University
2020	LN slab waveguides by grating metasurfaces^[48]	0.05	25 mW (1064 nm)	–	–	$4.6 \times 10^{- 7}$	Nanjing University

Table 2. Performance Comparisons of Different Micro- and Nanostructures Based on TFLN

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Table 2. Performance Comparisons of Different Micro- and Nanostructures Based on TFLN

Year	Structure	Mechanism	Structure Parameter (Radius R, Diameter D, Height H, Thickness T)	Peak Pump Intensity/Power ( $λ_{FF}$ )	Q Factor ( $λ$ )	$η_{SH}$	$η_{\dim}^{SH}$ ( $W^{- 1}$ )/Unstructured LN	Institute
2012–2013	Embedded Ag-LN^[83,84]	Fabry–Perot resonance	Coaxial aperture (R_inner $= 65 nm$ , R_outer $= 135 nm$ , H = 120 nm)	–1550 nm	–	–	$\sim 27 times$	FEMTO-ST, CNRS
2014	LN microdisk resonators^[85]	Cavity resonance	LN microdisk (D = 28 µm, T = ∼300 nm)	1.8 mW (1546 nm)	$1.02 \times 10^{5}$ (1507 nm)	–	0.109	Harvard University
2015	High-Q LN microresonator^[76]	Femtosecond laser micromachining	LN microdisk (D = ∼82 µm, T = ∼670 nm)	54.6 µW (1550 nm)	$2.45 \times 10^{6}$ (1550 nm)	–	$2.30 \times 10^{- 3}$	Shanghai Institute of Optics and Fine Mechanics
2015	LN-filled gold nanorings^[59]	Plasmonic resonance	Ring R_inner $= 80 nm$ , R_outer $= 120 nm$ , H = 100 nm)	$4 GW / {cm}^{2}$ (820 nm)	–	–	$\sim 20 times$	Friedrich Schiller University Jena
2017	LN microdisk resonator^[75]	Broadband SPDC	LN microdisk (R = 45 µm, T = 300 nm)	115 µW (1549.32 nm)	$1.2 \times 10^{5}$ (1549.32 nm)	–	$3.6 \times 10^{- 3}$	University of Rochester
2018	PPLN microcavity^[74]	Whispering gallery mode (WGM)	PPLN microdisk (D = ∼80 µm, T = 700 nm)	1.1 mW (1550 nm)	$6.7 \times 10^{5}$	–	$2.2 \times 10^{- 3}$	Nankai University
2018	Gold deposited on TFLN^[70]	Plasmonic SHG	Gold film (T = ∼30 nm)	$60 MW / {cm}^{2}$ (1240 nm)	–	$2 \times 10^{- 13}$	–	Macquarie University
2018	LN nanodisks on an Al substrate^[81]	Anapole resonances	LN nanodisk (D = 256 nm, H = 70 nm)	$5.31 GW / {cm}^{2}$ (351.3 nm)	–	$1.1528 \times 10^{- 5}$	–	Institute of Lasers, State Academy of Sciences
2019	On-chip monocrystalline TFLN microdisk resonator^[78]	QPM	LN microdisk (D = ∼30 µm, T = 600 nm)	0.25 mW (1547.8 nm)	$9.61 \times 10^{6}$ (1547.8 nm)	–	9.9%/mW	Shanghai Institute of Optics and Fine Mechanics
2019	LNO nanocubes^[51]	Mie resonances	Nanocube (200 nm)	$1.7 GW / {cm}^{2}$ (720 nm)	–	–	$7.6 \times 10^{- 7}$	ETH Zürich
2019	Periodic LN bar and LN disk^[24]	Fano resonances	Bar and disk (D = 700 nm, T = 340 nm, L = 1100 nm)	$3.2 GW / {cm}^{2}$ (1605 nm)	2350 (1605 nm)	$3.165 \times 10^{- 4}$	–	Jinan University
2019	Superfine LN powder^[50]	Cavity-enhanced SHG	–	$1.58 GW / {cm}^{2}$ (793.5 nm)	–	–	–	Shanghai Jiao Tong University
2020	BPPLN microcavities^[49]	Multiple reciprocal vectors	Minimum domain unit (width = 100 nm)	0.02 mW (1550 nm)	$1.43 \times 10^{5}$	–	$5.1 \times 10^{- 1}$	Nankai University
2020	LNOI wafer^[86]	Fabry–Perot resonance	LN film (H = 196.8 nm)	$4.05 GW / {cm}^{2}$ (840 nm)	–	$1.6 \times 10^{- 5}$	–	Nankai University
2020	Nanostructured LN^[82]	Anapole resonances	LN nanodisk (D = 432 nm, H = 104 nm)	$5.31 GW / {cm}^{2}$ (565.4 nm)	–	$5.1371 \times 10^{- 5}$	0.1711	Jinan University
2020	LN metasurface^[52]	ED and MD Mie resonances	Nanocube (period = 870 nm, length = 700 nm)	$4.3 GW / {cm}^{2}$ (1550 nm)	–	$\sim 10^{- 6}$	$1.14 \times 10^{- 3}$	Friedrich Schiller University Jena
2021	LN nanograting metasurfaces^[83]	Mie resonance	Metasurface (period D = 600 nm, H = 235 nm)	$2.05 GW / {cm}^{2}$ (820 nm)	–	$4.2 \times 10^{- 6}$	$\sim 2 times$	Nankai University
2021	Integrated LN microresonators^[87]	Ultrahigh Q performance	LN microdisk (D = 1030 µm)	5 µW (1550 nm)	$1.56 \times 10^{8}$ ( $\sim 1551.52 nm$ )	–	602%/mW	Shanghai Institute of Optics and Fine Mechanics

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Yang Li, Zhijin Huang, Wentao Qiu, Jiangli Dong, Heyuan Guan, Huihui Lu, "Recent progress of second harmonic generation based on thin film lithium niobate [Invited]," Chin. Opt. Lett. 19, 060012 (2021)

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Paper Information

Category: Special Issue on Lithium Niobate Based Photonic Devices

Received: Feb. 25, 2021

Accepted: Apr. 15, 2021

Published Online: May. 25, 2021

The Author Email: Heyuan Guan (ttguanheyuan@jnu.edu.cn), Huihui Lu (thuihuilu@jnu.edu.cn)

DOI:10.3788/COL202119.060012

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laser devices and laser physics

Lasers and Laser Optics

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