High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference

Shuai Yang; Lirong Qiu; Liang Tang; Zheng Yang; Jian Cui; Yun Wang; Weiqian Zhao

doi:10.3788/AOS230752

Acta Optica Sinica, Volume. 43, Issue 15, 1500003(2023)

High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference

Shuai Yang, Lirong Qiu, Liang Tang, Zheng Yang, Jian Cui, Yun Wang, and Weiqian Zhao^*

Key Laboratory of Complex-Field Intelligent Exploration, Ministry of Industry and Information Technology, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China

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Shuai Yang, Lirong Qiu, Liang Tang, Zheng Yang, Jian Cui, Yun Wang, Weiqian Zhao. High-Precision Measurement Technology and Instrument with Laser Differential Confocal Interference[J]. Acta Optica Sinica, 2023, 43(15): 1500003

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Paper Information

Category: Reviews

Received: Mar. 30, 2023

Accepted: May. 9, 2023

Published Online: Aug. 3, 2023

The Author Email: Weiqian Zhao (zwq669@126.com)

DOI:10.3788/AOS230752

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology