Acta Optica Sinica, Volume. 31, Issue 10, 1029001(2011)

Different Films Influence on Polarized Light Scattering of Slightly Rough Substrate

Gong Lei* and Wu Zhensen
Author Affiliations
  • [in Chinese]
  • show less
    References(13)

    [1] [1] Gong Lei, Wu Zhensen. Analysis of light scattering about slightly non-spherical nanoparticles on wafers[J]. Chinese J. Lasers, 2011, 38(1): 0110001

    [4] [4] T. A. Germer, G. W. Mulholland, J. H. Kim et al.. Measurement of the 100 nm NIST SRM 1963 by laser surface light scattering[C]. SPIE, 2002, 4779: 60~71

    [5] [5] T. A. Germer, C. C. Asmail. Polarization of light scattered by microrough surfaces and subsurface defects[J]. J. Opt. Soc. Am. A, 1999, 16(6): 1326~1332

    [6] [6] C.-Y. Liu. W.-F. Fu. Polarized angular dependence of out-of-plane light-scattering measurements for nanoparticles on wafer[J]. Opt. Commun., 2009, 282(11): 2097~2103

    [8] [8] Shen Jian, Deng Degang, Kong Weijin et al.. Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface[J]. J. Opt. Soc. Am. A, 2006, 23(11): 2810~2816

    [10] [10] T. A. Germer. Polarized light scattering by microroughness and small defects in dielectric layers[J]. J. Opt. Soc. Am. A, 2001, 18(6): 1279~1288

    [11] [11] T. A. Germer. Polarized light diffusely scattered under smooth and rough interfaces[C]. SPIE, 2003, 5158: 193~204

    [12] [12] R. G. Priest, T. A. Germer. Polarimetric BRDF in the microfacet model: theory and measurements[C]. Proceedings of the 2000 Meeting of the Military Sensing Symposia Specialty Group on Passive Sensors, 2000, 1: 169~181

    CLP Journals

    [1] Min Yang, Yonghua Fang, Jun Wu, Fangxiao Cui, Dacheng Li, Yue Wu, Tao Wang. Multiple-Component Polarized Bidirectional Reflectance Distribution Function Model for Painted Surfaces Based on Kubelka-Munk Theory[J]. Acta Optica Sinica, 2018, 38(1): 0126002

    [2] Gong Lei, Wu Zhensen, Gao Ming. Analysis of Composite Light Scattering Properties Between Wafers and Many Shapes of Particles with Different Positions[J]. Acta Optica Sinica, 2012, 32(6): 629003

    [3] Zou Xiren, Bai Lu, Wu Zhensen. Mirror Reflectance Spectrum Modeling of Smooth Samples[J]. Acta Optica Sinica, 2013, 33(6): 612008

    Tools

    Get Citation

    Copy Citation Text

    Gong Lei, Wu Zhensen. Different Films Influence on Polarized Light Scattering of Slightly Rough Substrate[J]. Acta Optica Sinica, 2011, 31(10): 1029001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Scattering

    Received: Mar. 1, 2011

    Accepted: --

    Published Online: Sep. 5, 2011

    The Author Email: Lei Gong (zzgonglei@126.com)

    DOI:10.3788/aos201131.1029001

    Topics