Chinese Optics Letters, Volume. 11, Issue s1, S10603(2013)
Optical performance, structure and thermal stability of Al(1wt.-%Si)/Zr and Al(pure)/Zr multilayers designed for the 17–19 nm range
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Qi Zhong, Wenbin Li, Zhong Zhang, Jingtao Zhu, Qiushi Huang, Haochuan Li, Zhanshan Wang, Philippe Jonnard, Karine Le Guen, Yanyan Yuan, Jean-Michel Andre, Hongjun Zhou, Tonglin Huo, "Optical performance, structure and thermal stability of Al(1wt.-%Si)/Zr and Al(pure)/Zr multilayers designed for the 17–19 nm range," Chin. Opt. Lett. 11, S10603 (2013)
Category: Duv/euv coatings
Received: Dec. 6, 2012
Accepted: Dec. 29, 2012
Published Online: Jun. 10, 2013
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