Fig. 1. Measurement principle of line structured light galvanometer scanning system

Fig. 2. Relative position relationship among laser plane, mirror and rotational axis. (a) Ideal state; (b) laser plane is parallel to x axis; (c) laser plane intersects x axis; (d) mirror is parallel to ideal position, and laser plane passes through x axis; (e) mirror is not parallel to ideal position, and laser plane passes through x axis; (f) mirror is not parallel to ideal position, and laser plane intersects x axis

Fig. 3. Reflection transformation

Fig. 4. Computing laser plane equation at specific swing angle

Fig. 5. Schematic diagram of line structured light galvanometer scanning system

Fig. 6. Calibration of laser plane. (a) Image of chess board; (b) laser stripes on chess board at different swing angles

Fig. 7. Comparison of coefficients of reflected laser plane between calibrated and model results. (a) Coefficient A; (b) coefficient B; (c) coefficient C; (d) coefficient D

Fig. 8. Schematic diagram of steps and height measurement results. (a) Schematic diagram of steps; (b)--(f) measurement results under different arrangements of steps

Fig. 9. Surface with multi-scale features and measurement results. (a) Physical diagram of measured surface; (b) measured points; (c) measured surface; (d) pentagram feature

Fig. 10. Measurement results of plane. (a) Three-dimensional surface; (b) profile result analysis

Fig. 11. Relationship between swing angle error and measurement error. (a) Computation principle; (b) maximum measurement error induced by swing angle error