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Laser & Optoelectronics Progress, Volume. 60, Issue 3, 0312017(2023)

MEMS Optical Acoustic Sensor

Yongqiu Zheng1, Jiamin Chen1,2, Xinyu Zhao1, Jiandong Bai1, Liyun Wu1, and Chenyang Xue1、*
Author Affiliations
  • 1State Key Laboratory of Dynamic Measurement Technology, North University of China, Taiyuan 030051, Shanxi, China
  • 2School of Software, North University of China, Taiyuan 030051, Shanxi, China
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    Article index updated: Sep. 11, 2025

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    Yongqiu Zheng, Jiamin Chen, Xinyu Zhao, Jiandong Bai, Liyun Wu, Chenyang Xue. MEMS Optical Acoustic Sensor[J]. Laser & Optoelectronics Progress, 2023, 60(3): 0312017

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 8, 2022

    Accepted: Nov. 16, 2022

    Published Online: Feb. 13, 2023

    The Author Email: Chenyang Xue (xuechenyang@nuc.edu.cn)

    DOI:10.3788/LOP222693

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology