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Opto-Electronic Engineering, Volume. 38, Issue 12, 75(2011)

Ultra-precision Manufacturing Technology with Soft Abrasive Grinding for Silicon

JIN Zhao1、*, LI Jin-sheng1, KANG Ren-ke2, ZHANG Ji-you1, WANG Yong-gang1, and MENG Xiao-hui1
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  • 2[in Chinese]
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    JIN Zhao, LI Jin-sheng, KANG Ren-ke, ZHANG Ji-you, WANG Yong-gang, MENG Xiao-hui. Ultra-precision Manufacturing Technology with Soft Abrasive Grinding for Silicon[J]. Opto-Electronic Engineering, 2011, 38(12): 75

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    Received: Sep. 4, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Zhao JIN (gk_110@163.com)

    DOI:10.3969/j.issn.1003-501x.2011.12.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology