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Opto-Electronic Engineering, Volume. 38, Issue 12, 41(2011)

Analysis of Characteristics of Micromachined Electrostatic Repulsive Actuator

TAO Feng-gang1,2、*, YAO Jun1, WANG Wei-min1, ZHUANG Xu-ye1, ZHANG Heng1,2, and HU Fang-rong3
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    TAO Feng-gang, YAO Jun, WANG Wei-min, ZHUANG Xu-ye, ZHANG Heng, HU Fang-rong. Analysis of Characteristics of Micromachined Electrostatic Repulsive Actuator[J]. Opto-Electronic Engineering, 2011, 38(12): 41

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    Paper Information

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    Received: Sep. 2, 2011

    Accepted: --

    Published Online: Dec. 22, 2011

    The Author Email: Feng-gang TAO (tfg86@mail.ustc.edu.cn)

    DOI:10.3969/j.issn.1003-501x.2011.12.008

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology