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APPLIED LASER, Volume. 39, Issue 2, 346(2019)

Research Progress and Application of Femtosecond Laser in Microfabrication

Yang Han1、*, Yu Xichen1, Wu Yifan1, Liu Haiqing2, and Li Dongya1
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  • 1[in Chinese]
  • 2[in Chinese]
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    Yang Han, Yu Xichen, Wu Yifan, Liu Haiqing, Li Dongya. Research Progress and Application of Femtosecond Laser in Microfabrication[J]. APPLIED LASER, 2019, 39(2): 346

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    Paper Information

    Received: Oct. 12, 2018

    Accepted: --

    Published Online: Jun. 10, 2019

    The Author Email: Han Yang (995516594@qq.com)

    DOI:10.14128/j.cnki.al.20193902.346

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology