In recent years, researchers from various countries have invested in the field of micro-processing research in order to make the processing technology more accurate and error-free. Femtosecond laser has become a hot research topic at home and abroad with its extremely high peak intensity, small damage threshold and high focusing force. In this paper, the research progress of femtosecond laser in the field of microfabrication is reviewed and the research progress in the fields of microfabricated metal materials, integrated optics, biomedical and nano-fabrication is discussed in detail. Finally, the existing problems of femtosecond laser development are pointed out and the expectations for the future are put forward.