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Chinese Journal of Lasers, Volume. 29, Issue 1, 69(2002)

Measuring the Laser Beam Position by Using a CMOS Photodiode Array and Interpolation Method

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    [4] [4] Wang Rong. Application of interpolation method in laser alignment [D]. Master Thesis. Tsinghua University, 1984. 35～73 (in Chinese)

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    [1] WANG Da-hui, QIAN Hang, ZHAO Xue-qing, MA Lian-ying, ZHANG Yong-sheng, SHAO Bi-bo, FENG Gang, YI Ai-ping, ZHAO Jun. Automatic alignment of multiplexed beams of excimer laser system based on fluorescence imaging[J]. Optics and Precision Engineering, 2015, 23(4): 949

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    [in Chinese], [in Chinese]. Measuring the Laser Beam Position by Using a CMOS Photodiode Array and Interpolation Method[J]. Chinese Journal of Lasers, 2002, 29(1): 69

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    Paper Information

    Category: measurement and metrology

    Received: Sep. 18, 2000

    Accepted: --

    Published Online: Aug. 8, 2006

    The Author Email: (mengxn@post.pim.tsinghua.edu.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology