Piezoelectrics & Acoustooptics, Volume. 44, Issue 3, 435(2022)
Study on the Effect of Parylene Encapsulation for the Performance of MEMS Acoustic Sensor
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WU Pengcheng, TSANG Wei Mong, LI Xin, AN Xing, ZHU Xin, YI Yongjie, HUANG Xiangjun, DI Xiao. Study on the Effect of Parylene Encapsulation for the Performance of MEMS Acoustic Sensor[J]. Piezoelectrics & Acoustooptics, 2022, 44(3): 435
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Received: Mar. 27, 2022
Accepted: --
Published Online: Jul. 24, 2022
The Author Email: Pengcheng WU (pc17623656898@163.com)
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