Infrared and Laser Engineering, Volume. 50, Issue 7, 20211047(2021)
High-performance thin-film electro-optical modulator based on heterogeneous silicon and lithium niobate platform (Invited)
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Fig. 1. Hybrid silicon and lithium niobate electro-optical modulator. (a) Schematic of Mach-Zender intensity modulator; (b) SEM image of lithium niobate phase modulation region; (c) The cross section SEM image of the modulation region, the section is formed by the focused ion beam process; (d) Image of the whole chip
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Shihao Sun, Xinlun Cai. High-performance thin-film electro-optical modulator based on heterogeneous silicon and lithium niobate platform (Invited)[J]. Infrared and Laser Engineering, 2021, 50(7): 20211047
Paper Information
Category: Special issue on microwave photonics $ Letters
Received: Apr. 12, 2021
Accepted: --
Published Online: Aug. 23, 2021
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