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Piezoelectrics & Acoustooptics, Volume. 47, Issue 1, 135(2025)

Kinematic Analysis of a 6-DOF Parallel Platform Based on Piezoelectric Actuation

ZHU Baocai... LIU Yuetao, YU Zhiyong, WEN Shanglin and ZOU Dalin |Show fewer author(s)
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  • College of Mechanical Engineering, Shandong University of Technology, Zibo 255000, China
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    [4] [4] PUMPHREY M, ABOUZARKHANIFARD A, ZHANG Lihong, et al. A parallel type micro-robotic system for semi-conductor manufacturing machines: preliminary results[C]∥Delft, Netherlands: 2021 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM), 2021: 532-539.

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    ZHU Baocai, LIU Yuetao, YU Zhiyong, WEN Shanglin, ZOU Dalin. Kinematic Analysis of a 6-DOF Parallel Platform Based on Piezoelectric Actuation[J]. Piezoelectrics & Acoustooptics, 2025, 47(1): 135

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    Paper Information

    Received: Sep. 20, 2024

    Accepted: Apr. 17, 2025

    Published Online: Apr. 17, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.01.022

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology