Acta Optica Sinica, Volume. 34, Issue 10, 1022004(2014)

Source Optimization Method of Lithography Tools Based on Quadratic Programming

Yan Guanyong1,2、*, Li Sikun1, and Wang Xiangzhao1,2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    Cited By

    Article index updated: Sep. 6, 2025

    The article is cited by 8 article(s) CLP online library. (Some content might be in Chinese.)
    Tools

    Get Citation

    Copy Citation Text

    Yan Guanyong, Li Sikun, Wang Xiangzhao. Source Optimization Method of Lithography Tools Based on Quadratic Programming[J]. Acta Optica Sinica, 2014, 34(10): 1022004

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Optical Design and Fabrication

    Received: Apr. 22, 2014

    Accepted: --

    Published Online: Sep. 9, 2014

    The Author Email: Yan Guanyong (ygy9911@163.com)

    DOI:10.3788/aos201434.1022004

    Topics