Infrared and Laser Engineering, Volume. 51, Issue 4, 20210333(2022)
Process on ethanol assisted laser ablation dicing of silicon wafer
[1] Wang Y, Li C Q, Zhang H Z, et al. Research on unconventional laser machining[J]. Infrared and Laser Engineering, 40, 448-454(2011).
[2] Wang Z, Fu W J, Zhang R Z. Numerical simulation of femtosecond laser multi-pulse ablation of metal iron[J]. Infrared and Laser Engineering, 48, 0706002(2019).
[3] Guo M, Zhang Y X, Zhang W Y, et al. Thermal damage of monocrystalline silicon irradiated by long pulse laser[J]. Infrared and Laser Engineering, 49, 0305002(2020).
[4] Yang W, Peng X H, Zhang J. Study of laser cutting technology for silicon wafer under water[J]. Chinese Journal of Lasers, 36, 3064-3067(2009).
[5] Huang H K, Lai J C, Lu J, et al. Study on Nd: YAG ns pulsed laser ablation of Ge target in water[J]. Infrared and Laser Engineering, 49, 20190498(2020).
[6] Zhong X, Eshraghi J, Vlachos P, et al. A model for a laser-induced cavitation bubble[J]. International Journal of Multiphase Flow, 132, 103433(2020).
[7] Avila S G, Ohl C D. Fragmentation of acoustically levitating droplets by laser-induced cavitation bubbles[J]. Journal of Fluid Mechanics, 805, 551-576(2016).
[8] Ren X D, He H, Tong Y Q, et al. Experimental investigation on dynamic characteristics and strengthening mechanism of laser-induced cavitation bubbles[J]. Ultrasonics Sonochemistry, 32, 218-223(2016).
[9] Charee W, Tangwarodomnukun V, Dumkum C. Ultrasonic-assisted underwater laser micromachining of silicon[J]. Journal of Materials Processing Technology, 231, 209-220(2016).
[10] Bao J, Long Y, Tong Y, et al. Experiment and simulation study of laser dicing silicon with water-jet[J]. Applied Surface Science, 387, 491-496(2016).
[11] Kanitz A, Kalus M R, Gurevich E L, et al. Review on experimental and theoretical investigations of the early stage, femtoseconds to microseconds processes during laser ablation in liquid-phase for the synthesis of colloidal nanoparticles[J]. Plasma Sources Science and Technology, 28, 103001(2019).
[12] De B A, Sansone M, D'Alessio L, et al. Dynamics of laser-induced bubble and nanoparticles generation during ultra-short laser ablation of Pd in liquid[J]. Journal of Physics D:Applied Physics, 46, 445301(2013).
[13] Wagener P, Ibrahimkutty S, Menzel A, et al. Dynamics of silver nanoparticle formation and agglomeration inside the cavitation bubble after pulsed laser ablation in liquid[J]. Physical Chemistry Chemical Physics Pccp, 15, 3068-3074(2013).
[14] Giacomo A D, Dell'Aglio M, Santagata A, et al. Cavitation dynamics of laser ablation of bulk and wire-shaped metals in water during nanoparticles production[J]. Physical Chemistry Chemical Physics Pccp, 15, 3083-3092(2013).
[15] Fan L T, Yuan X G, Zhou C X, et al. Contact Angle of Ethanol and n‐Propanol Aqueous Solutions on Metal Surfaces[J]. Chemical Engineering & Technology, 34, 1535-1542(2011).
[16] Barcikowski S, Zhang D S, Gökce B, et al. Debris-free rear-side picosecond laser ablation of thin germanium wafers in water with ethanol[J]. Applied Surface Science:A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials, 367, 222-230(2016).
[17] Ma Z G, Wang J A, Yu Y, et al. Light extinction properties of underwater bubble films[J]. Laser Technology, 33, 18-20(2009).
Get Citation
Copy Citation Text
Wentao Tian, Weicheng Liu, Xuhui Sun, Hongyu Zheng, Zhiwen Wang. Process on ethanol assisted laser ablation dicing of silicon wafer[J]. Infrared and Laser Engineering, 2022, 51(4): 20210333
Category: Lasers & Laser optics
Received: May. 24, 2021
Accepted: --
Published Online: May. 18, 2022
The Author Email: