Computer-Aided Alignment Method Based on Shack-Hartmann Sensor

Table 1. Design parameters of three-mirror optical system
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Table 1. Design parameters of three-mirror optical system
Surface Radius /mm Distance /mm Conic
Primary mirror (PM) 1501.10 598.32 -0.96680
Second mirror (SM) 389.53 781.32 -2.18720
Flat mirror (FM) Infinity 355.25 0
Third mirror (TM) 521.13 639.70 -0.51302

Table 2. Parameters of Shack-Hartmann sensor
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Table 2. Parameters of Shack-Hartmann sensor
Diameter /mm Size of microlens array Focus length /mm Resolution of CCD Size of CCD /(mm×mm)
10 9×9 7 512×512 10×10

Table 3. Variance of residual assembly error during alignment

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Table 3. Variance of residual assembly error during alignment

Iterations	x_DE /mm	y_DE /mm	A_DE /(°)	B_DE /(°)	z_DE /mm
Initial misalignment	0.2300	0.1600	-0.1700	0.1460	0.2500
1^st calculated misalignment	0.2957	0.1183	-0.1589	0.1667	0.1799
Residual error after 1^st alignment	-0.0657	0.0416	-0.0111	-0.0207	0.0701
2^nd calculated misalignment	-0.0743	0.0311	-0.0085	-0.0235	0.0567
Residual error after 2^nd alignment	0.0086	0.0105	-0.0026	0.0028	0.0134
3^rd calculated misalignment	0.0074	0.0123	-0.0011	0.0019	0.0107
Residual error after 3^rd alignment	0.0012	-0.0018	-0.0015	0.0009	0.0027

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Wei Wu, Zirong Luo, Naihui Yu, Jianzhong Shang. Computer-Aided Alignment Method Based on Shack-Hartmann Sensor[J]. Acta Optica Sinica, 2021, 41(20): 2022001

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