Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang; Xu Liu; Xiang Hao

doi:10.3788/LOP230533

Laser & Optoelectronics Progress, Volume. 60, Issue 8, 0811007(2023)

Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement

Yueying Wang^1,2, Xu Liu^1、**, and Xiang Hao^1,2、*

Author Affiliations

¹College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, Zhejiang, China

²Intelligence Optics and Photonics Research Center, Jiaxing Research Institute, Zhejiang University, Jiaxing 314000, Zhejiang, China

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Yueying Wang, Xu Liu, Xiang Hao. Advances of Confocal Microscopy in Three-Dimensional Surface Topography Measurement[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811007

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Paper Information

Category: Imaging Systems

Received: Jan. 26, 2023

Accepted: Mar. 6, 2023

Published Online: Apr. 13, 2023

The Author Email: Xu Liu (liuxu@zju.edu.cn), Xiang Hao (haox@zju.edu.cn)

DOI:10.3788/LOP230533

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology