Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 851(2022)

Transition Layer Thin Film for Strain Transfer of Surface Acoustic Wave at High Temperature

SONG Xinyu, JIN Hao, DONG Shurong, and LUO Jikui
Author Affiliations
  • [in Chinese]
  • show less
    References(15)

    [1] [1] JIANG Xiaoning,KIM K,ZHANG Shujun,et al.High-temperature piezoelectric sensing[J].Sensors,2013,14(1):144-169.

    [2] [2] GREVE D W,CHIN T L,ZHENG Peng,et al.Surface acoustic wave devices for harsh environment wireless sensing[J].Sensors,2013,13(6):6910-6935.

    [3] [3] HORNSTEINER J,BORN E,FISCHERAUER G,et al.Surface acoustic wave sensors for high-temperature applications[J].Proc of the 1998 IEEE International Frequency Control Symposium (Cat.No.98CH36165),1998:615-620.

    [4] [4] XU Hongsheng,DONG Shurong,XUAN Weipeng,et al.Flexible surface acoustic wave strain sensor based on single crystalline LiNbO3 thin film[J].Appl Phys Lett,2018,112(9):093502.

    [5] [5] AUBERT T,ELMAZRIA O,ASSOUAR M B.Wireless and batteryless surface acoustic wave sensors for high temperature environments[C]//Beijing:2009 9th International Conference on Electronic Measurement Instruments,2009:890-898.

    [6] [6] MASKAY A,AYES A,LAD R,et al.Stability of Pt/Al2O3-based electrode langasite SAW sensors with Al2O3 capping layer and yttria-stabilized zirconia sensing layer[C]// Washington,DC,USA:2017 IEEE International Ultrasonics Symposium (IUS) IEEE,2017:1-4.

    [7] [7] WANG Shouqi,HARADA J,UDA S.A wireless surface acoustic wave temperature sensor using langasite as substrate material for high-temperature applications[J].Jpn JAppl Phys,2003,42(19B):6124-6127.

    [8] [8] LI Ling,PENG Bin,ZHU Jialiang,et al.Strain measurements with langasite SAW resonators at high temperature[J].IEEE Sens J,2021,21(4):4688-4695.

    [9] [9] SHU Lin,PENG Bin,YANG Zhengbing,et al.High-temperature SAW wireless strain sensor with langasite[J].Sensors,2015,15(11):28531-28542.

    [10] [10] SHU Lin,WANG Xuemin,LI Ling,et al.The investigation of integrated SAW strain sensor based on AlN/TC4 structure[J].Sens Actuators Phys,2019,293:14-20.

    [11] [11] MASKAY A,PEREIRA DA CUNHA M.High- temperature static strain langasite SAWR sensor:Temperature compensation and numerical calibration for direct strain reading[J].Sens Actuators Phys,2017,259:34-43.

    [12] [12] JILANI S F,LEFF D,MASKAY A,et al.Static strain modelling,calibration,and measurements for high-temperature wireless SAW resonator operation[C]//[S.l.]:2020 IEEE International Ultrasonics Symposium (IUS),2020:1-4.

    [13] [13] DONOHOE B,GERAGHTY D,O’DONNELL G E,et al.Packaging considerations for a surface acoustic wave strain sensor[J].IEEE Sens J,2012,12(5):922-925.

    [14] [14] STONEY R,GERAGHTY D,O’DONNELL G E.Characterization of differentially measured strain using passive wireless surface acoustic wave(SAW) strain sensors[J].IEEE Sens J,2014,14(3):722-728.

    [15] [15] XU Hongsheng,JIN Hao,DONG Shurong,et al.Mode analysis of Pt/LGS surface acoustic wave devices[J].Sensors,2020,20(24):7111.

    Tools

    Get Citation

    Copy Citation Text

    SONG Xinyu, JIN Hao, DONG Shurong, LUO Jikui. Transition Layer Thin Film for Strain Transfer of Surface Acoustic Wave at High Temperature[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 851

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Feb. 24, 2022

    Accepted: --

    Published Online: Jan. 27, 2023

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2022.06.005

    Topics