Piezoelectrics & Acoustooptics, Volume. 44, Issue 6, 851(2022)
Transition Layer Thin Film for Strain Transfer of Surface Acoustic Wave at High Temperature
The surface acoustic wave (SAW) devices are widely used in extreme environmental sensing. Lanthanum gallium silicate(LGS) is a commonly used high-temperature piezoelectric crystal, but at high temperature, the strain glue cannot effectively transmit strain due to the bonding force. The transition layer thin film technology for the strain sensing at high temperature is studied in this paper. A new method and process technology of the transition layer thin film are proposed, which can realize the effect of more stable strain transition of the high temperature strain glue. The results show that the use of sputtering Al re-oxidation can significantly improve the bonding force between LGS and high-temperature glue, so as to realize good strain transfer. A super-large-scale measurement of 1 000 με is realized at 500 ℃ by using this transition layer.
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SONG Xinyu, JIN Hao, DONG Shurong, LUO Jikui. Transition Layer Thin Film for Strain Transfer of Surface Acoustic Wave at High Temperature[J]. Piezoelectrics & Acoustooptics, 2022, 44(6): 851
Received: Feb. 24, 2022
Accepted: --
Published Online: Jan. 27, 2023
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