Optics and Precision Engineering, Volume. 21, Issue 1, 144(2013)

Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 machine

XIA Yi-min1,*... YANG Tian-ren1, ZHANG Gang-qiang1, LUO Song-bao2 and YU Hong-yun1 |Show fewer author(s)
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  • 1[in Chinese]
  • 2[in Chinese]
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    References(11)

    [1] [1] YUAN J L, WANG ZH W, WEN D H, et al.. Review of the current situation of ultra-precision machining [J]. Chinese Journal of Mechanical Engineering, 2007, 43(1): 35-48. (in Chinese)

    [3] [3] ZHANG X Y. Research on DHM-500 ultra-precision CNC non-spherical lens grinding machine [J]. Nanotechnology and Precision Engineering, 2004, 2(1): 54-58. (in Chinese)

    [4] [4] LUCA A, MARIO P. Hydrostatic journal bearing with coaxial floating sleeve [J]. Mechanics Research Communication, 2006,33 (3): 394-400.

    [5] [5] SATISH C S, JAIN S C, BHARUKA D K. Influence of recess shape on the performance of a capillary compensated circular thrust pad hydrostatic bearing [J]. Tribology International, 2002, 35(6): 347-356.

    [6] [6] CHEN C H, YUAN K, CHANG Y P, et al.. Influence of recess geometry and restrictor dimension on flow patterns and pressure distribution of hydrostatic bearings [J]. American Society of Mechanical Engineers, International Gas Turbine Institute, 2007,5: 1045-1053.

    [7] [7] ZAREENA A R, VELDHUIS S C. Tool wear mechanisms and tool life enhancement in ultra-precision machining of titanium [J]. Journal of Material Precessing Technology, 2012, 212(3): 560-570.

    [8] [8] JOHNSON R E, MANRING N D. Sensitivity studies for the shallow-pocket geometry of a hydrostatic thrust bearing [J]. American Society of Mechanical Engineers, Fluid Power and Systems Technology Division(Publication)FPST, 2003,10: 231-238.

    [9] [9] SHAO J P, DAI C X,ZHANG Y Q, et al.. The effect of oil cavity depth on temperature field in heavy hydrostatic thrust bearing[J]. Journal of Hydrodynamics, 2011, 23(5):676-680.

    [10] [10] JIANG J H, MA W Q, ZHAO K D. Characteristics of annular hydrostatic bearing at varying oil viscosity[J]. Journal of Harbin Institute of Technology, 2000, 32(4): 19-21.(in Chinese)

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    XIA Yi-min, YANG Tian-ren, ZHANG Gang-qiang, LUO Song-bao, YU Hong-yun. Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 machine[J]. Optics and Precision Engineering, 2013, 21(1): 144

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    Paper Information

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    Received: Aug. 27, 2012

    Accepted: --

    Published Online: Mar. 5, 2013

    The Author Email: XIA Yi-min (xiaymj@mail.csu.edu.cn)

    DOI:10.3788/ope.20132101.0144

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