Optics and Precision Engineering, Volume. 21, Issue 1, 144(2013)

Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 machine

XIA Yi-min1,*... YANG Tian-ren1, ZHANG Gang-qiang1, LUO Song-bao2 and YU Hong-yun1 |Show fewer author(s)
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    XIA Yi-min, YANG Tian-ren, ZHANG Gang-qiang, LUO Song-bao, YU Hong-yun. Flow field distribution and bearing characteristics of hydrostatic thrust bearing in Nanosys-1000 machine[J]. Optics and Precision Engineering, 2013, 21(1): 144

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    Paper Information

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    Received: Aug. 27, 2012

    Accepted: --

    Published Online: Mar. 5, 2013

    The Author Email: XIA Yi-min (xiaymj@mail.csu.edu.cn)

    DOI:10.3788/ope.20132101.0144

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