Optics and Precision Engineering, Volume. 16, Issue 5, 894(2008)

Mechanical coupling error of silicon microgyroscope

[in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    References(5)

    [2] [2] HAN J S,KWAK B M,Robust optimal design of a vibratory microgyroscope considering fabrication errors[J].J.Micromechanics and Microengineering,2001,66(11):662-671.

    [3] [3] SHKEL A,HOWE R T,HOROWITZ R.Modeling and simulation of micromachined gyroscopes in the presence of imperfections[C].Int.Conf.on Modeling and Simulation of Microsystems,San Juan,Puerto Rico,1999:605-608.

    [4] [4] YEH B Y,YUNG C L,TAY E H.Mathematical modeling on the quadrature error of low-rate microgyroscope for aerospace applications[J].Analog Integrated Circuits and Signal Processing,2001,29(2):85-94.

    [6] [6] IYER S V.Modeling and simulation of non-idealities in a z-axis CMOS-MEMS gyroscope[D].Pennsylvania:Carnegie Mellon University Pittsburgh,2003.

    [8] [8] MARC S W,KAPLESH K,THOMAS K A.Dynamically balanced microelectromechanical devices:US6571630[P].2003.

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Mechanical coupling error of silicon microgyroscope[J]. Optics and Precision Engineering, 2008, 16(5): 894

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    Paper Information

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    Received: Oct. 8, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

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