Fig. 1. Preparation process of polymer SU-8 waveguide

Fig. 2. Preparation process of PMMA waveguide

Fig. 3. Scanning electron micrographs of waveguide section. (a) Sectional view of polymer SU-8 rectangular waveguide; (b) sectional view of polymer SU-8 Mach-Zehnder waveguide; (c) plan view of polymer SU-8 Mach-Zehnder waveguide; (d) sectional view of PMMA rectangular waveguide

Fig. 4. Test system

Fig. 5. Output optical intensity variation of polymer SU-8 waveguide. (a) Under LED with different wavelength and laser pumping; (b) under 405-nm LED pumping with different power

Fig. 6. Output optical intensity variation of the polymer SU-8 waveguide under LED pumping with different wavelength. (a) 980-nm laser as signal source; (b) 635-nm laser as signal source

Fig. 7. Comparison of optical field attenuation of different signal sources under LED pumping with different wavelength

Fig. 8. Output optical intensity versus waveguide with different width

Fig. 9. Comparison of optical intensity attenuation of waveguides with different width

Fig. 10. Output optical intensity variation of the Mach-Zehnder structure waveguide under LED pumping with different wavelength. (a) 1064-nm laser as signal source; (b) 635-nm laser as signal source

Fig. 11. Output optical intensity variation of PMMA waveguide under LED pumping with different wavelength. (a) 1064-nm laser as signal source; (b) 635-nm laser as signal source