Study on Microstructure Anti-reflection Performance Based on Sapphire Material

Wenni Zhang; Hongchao Cao; Fanyu Kong; Yibing Zhang; Rui Wang; Yunxia Jin; Jianda Shao

doi:10.3788/CJL230515

Chinese Journal of Lasers, Volume. 50, Issue 22, 2203101(2023)

Study on Microstructure Anti-reflection Performance Based on Sapphire Material

Wenni Zhang^1,2,3, Hongchao Cao^1,3, Fanyu Kong^1,3, Yibing Zhang^1,3, Rui Wang^1,3, Yunxia Jin^1,3,4、*, and Jianda Shao^1,3,4

Author Affiliations

¹Laboratory of Thin Film Optics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³Key Laboratory of Materials for High Power Laser, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

⁴CAS Center for Excellence in Ultra-Intense Laser Science, Chinese Academy of Sciences, Shanghai 201800, China

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Figures & Tables(17)

Fig. 1. Schematic of one-dimensional trapezoidal structure section

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Fig. 2. Effect of microstructure period on transmittance. (a) Transmittance versus wavelength under different microstructure periods; (b) transmittance at 795 nm versus microstructure period

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Fig. 3. Transmittance at center wavelength versus depth under different f. (a) f <0.18; (b) f ≥0.18

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Fig. 4. Transmittance at center wavelength versus f under different microstructure depths

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Fig. 5. Variation of transmittance at center wavelength under different $θ$ . (a) Transmittance versus f; (b) transmittance versus h

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Fig. 6. Process tolerance diagram of microstructure

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Fig. 7. Transmittance curve of designed anti-reflection film on sapphire substrate

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Fig. 8. Flow diagram of microstructure preparation

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Fig. 9. Topography of microstructure

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Fig. 10. Sample transmittance curves

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Fig. 11. Optical path for temperature rise test

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Fig. 12. Temperature rise diagram

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Fig. 13. Optical path for beam quality test

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Fig. 14. Beam quality test results. (a) 3#; (b) 4#

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Table 1. Microstructure atomic force microscopy test data
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Table 1. Microstructure atomic force microscopy test data
Sample No. Height /nm Top width /nm Duty cycle
1# 165 120 0.30
3# 155 124 0.31
3# 155 120 0.30
4# 175 85 0.22

Table 2. Maximum temperatures and beam quality factors under same pump power

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Table 2. Maximum temperatures and beam quality factors under same pump power

Sample No.	Pump power of 0 W			Pump power of 33.3 W
Sample No.	Maximum temperature /℃	$M_{x}^{2}$	$M_{y}^{2}$	Maximum temperature /℃	$M_{x}^{2}$	$M_{y}^{2}$
Bare substrate 1	26.8	1.202	1.204	282	1.424	1.627
3#	25.8	1.219	1.243	376	1.24	1.622
Bare substrate 2	26.1	1.149	1.189	299	1.22	1.369
4#	25.2	1.162	1.194	342	1.21	1.299

Table 3. Variation of beam quality factor

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Table 3. Variation of beam quality factor

Sample number	$M_{x}^{2}$			$M_{y}^{2}$
Sample number	25 ℃	200 ℃	Variation	25 ℃	200 ℃	Variation
Bare substrate 1	1.202	1.268	0.066	1.223	1.355	0.132
3#	1.219	1.205	-0.014	1.243	1.303	0.060
Bare substrate 2	1.149	1.181	0.032	1.189	1.278	0.089
4#	1.162	1.212	0.050	1.194	1.223	0.029

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Wenni Zhang, Hongchao Cao, Fanyu Kong, Yibing Zhang, Rui Wang, Yunxia Jin, Jianda Shao. Study on Microstructure Anti-reflection Performance Based on Sapphire Material[J]. Chinese Journal of Lasers, 2023, 50(22): 2203101

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