Journal of Synthetic Crystals, Volume. 50, Issue 3, 469(2021)

Quantum Chemistry Study on Gas Reactions Involved with Radicals in GaN-MOVPE Process

LIU Guofeng* and ZUO Ran
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    LIU Guofeng, ZUO Ran. Quantum Chemistry Study on Gas Reactions Involved with Radicals in GaN-MOVPE Process[J]. Journal of Synthetic Crystals, 2021, 50(3): 469

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    Paper Information

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    Received: Jan. 22, 2021

    Accepted: --

    Published Online: Apr. 15, 2021

    The Author Email: Guofeng LIU (815952562@qq.com)

    DOI:

    CSTR:32186.14.

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