Design and Alignment of Folded Off-Axis Three-Mirror Optical System

Fig. 4. Detection optical path after introducing optical axis of system.（a）Compensator and primary mirror are coaxial；（b）introduction of collimating planar mirror

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Fig. 5. Detection path of optical system

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Fig. 6. Flowchart of auxiliary installation

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Fig. 7. Final results of full field of view.（a）Central field of view；（b）-1 field of view；（c）+ 1 field of view

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Fig. 8. Image of resolution plate by camera

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Table 1. Design index of optical system
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Table 1. Design index of optical system
Parameter Value
Focal length /mm 1500±5
FOV /（°） ≥2
Entrance pupil diameter /mm ≥200
Waveband/nm 400‒700
MTF at frequency of 62.5 lp/mm >0.4

Table 2. Structure parameters of optical system

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Table 2. Structure parameters of optical system

No.	Radius /mm	Thickness /mm	Glass	Conic coefficient	Tilt / $(°)$	Y-axis eccentricity /mm
OBJ	∞	∞			0	0
STO	∞	300.000			0	177
3	-728.242	-290.662	Mirror	-0.9171	0	40
4	-237.563	186.478	Mirror	-3.6909	0	19
5	∞	-305.760	Mirror		45	-28
6	366.365	471.105	Mirror	-0.3212	0	-20

Table 3. Design results of optical system
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Table 3. Design results of optical system
Parameter Value
Focal length /mm 1500.003
FOV /（°） 2
Entrance pupil diameter /mm 200
Waveband /nm 400‒700
MTF at frequency of 62.5 lp/mm >0.58

Table 4. Sensitivity matrix

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Table 4. Sensitivity matrix

Aberration	Adjustment item
Aberration	T₃₁ /mm	T₃₂ /mm	D_x₂ /mm	D_y₂ /mm	R_x₂ /mm	R_y₂ /mm	D_x₃ /mm	D_y₃ /mm	R_x₃ /（°）	R_y₃ /（°）
（0，0）Z5	0.544	0.011	0	1.068	-0.146	0	0	0.097	0.044	0
（0，0）Z6	0	0	-1.199	0	0	-0.164	-0.098	0	0	0.044
（0，0）Z7	0	0	-0.207	0	0	-0.032	-0.016	0	0	0.004
（0，0）Z8	-0.182	-0.007	0	-0.140	0.023	0	0	-0.015	-0.004	0
（0，0）Z9	-0.010	-0.001	0	0.008	-0.001	0	0	0	0	0
（0，-1）Z5	0.575	0.029	0	1.073	0.178	0	0	0.085	0.015	0
（0，-1）Z6	0	0	-1.218	0	0	-0.199	-0.089	0	0	0.175
（0，-1）Z7	0	0	-0.208	0	0	-0.033	-0.016	0	0	0.004
（0，-1）Z8	-0.192	-0.009	0	-0.139	0.023	0	0	-0.014	-0.003	0
（0，-1）Z9	-0.010	-0.001	0	0.008	-0.001	0	0	0	0	0
（0，+1）Z5	0.557	-0.003	0	1.037	-0.109	0	0	0.109	0.072	0
（0，+1）Z6	0	0	-1.181	0	0	-0.130	-0.109	0	0	0.072
（0，+1）Z7	0	0	-0.206	0	0	-0.032	-0.016	0	0	0.004
（0，+1）Z8	-0.170	-0.003	0	-0.140	0.023	0	0	-0.017	-0.004	0
（0，+1）Z9	-0.010	-0.001	0	0.008	-0.001	0	0	0	0	0

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Taixi Chen, Yanxiong Wu, Shaoman Song, Shuxian Li. Design and Alignment of Folded Off-Axis Three-Mirror Optical System[J]. Laser & Optoelectronics Progress, 2021, 58(17): 1722001

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