Measurement Method and Alignment Error Analysis of Off-Axis Elliptical Cylindrical Mirror

Wenxin Jia; Sen Han; Linghua Zhang; Bo Han; Dayong Zhu; Huaikang Zhu

doi:10.3788/AOS202141.2012004

Acta Optica Sinica, Volume. 41, Issue 20, 2012004(2021)

Measurement Method and Alignment Error Analysis of Off-Axis Elliptical Cylindrical Mirror

Wenxin Jia¹, Sen Han^2,3、*, Linghua Zhang², Bo Han³, Dayong Zhu², and Huaikang Zhu²

Author Affiliations

¹School of Physical Science and Technology, Suzhou University of Science and Technology, Suzhou, Jiangsu 215009, China

²School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China

³Suzhou H & L Instruments LLC., Suzhou, Jiangsu 215123, China;

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Figures & Tables(7)

Fig. 1. Sectional view of binary ring grating

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Fig. 2. Measurement principle diagram

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Fig. 3. Off-axis elliptically cylindrical mirror placed on the cylindrical holding device

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Fig. 4. Experimental setup

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Fig. 5. Experimental measurement results. (a) Actual measurement of interference fringe pattern; (b) measurement topography; (c) Zernike coefficients; (d) surface parameters

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Fig. 6. Adjusted results. (a) Actual measurement of interference fringe pattern; (b) measurement topography; (c) Zernike coefficients; (d) surface parameters

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Table 1. The adjustment amount in experiment
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Table 1. The adjustment amount in experiment
D_x /mm D_y /mm D_z /mm θ_x /(10^-5 rad) θ_y /(10^-5 rad) θ_z /(10^-5 rad)
-0.035 -0.018 -0.012 4.802 -1.06 -2.402

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Wenxin Jia, Sen Han, Linghua Zhang, Bo Han, Dayong Zhu, Huaikang Zhu. Measurement Method and Alignment Error Analysis of Off-Axis Elliptical Cylindrical Mirror[J]. Acta Optica Sinica, 2021, 41(20): 2012004

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