Opto-Electronic Engineering, Volume. 38, Issue 11, 68(2011)
Fine Patterning of Optical Waveguide Films Fabricated by Photosensitive Sol-gel Process
[3] [3] Maria Zaharescu,Maria Crisan,Luminita Predoana,et al. Hybrid Inorganic-Organic Sol–Gel Coatings in the SiO2-TiO2 System [J]. Journal of Sol-Gel Science and Technology(S0928-0707),2004,32(1/3):173-177.
[4] [4] JIANG Hong-jin,YUAN Xiao-cong,YUN Zhi-sheng,et al. Fabrication of microlens in photosensitive hybrid sol–gel films using a gray scale mask [J]. Materials Science and Engineering C(S0928-4931),2001,16(1/2):99–102.
[5] [5] WHANG C M,YEO C S,KIM Y H,Preparation and Characterization of Sol-Gel Derived SiO2-TiO2-PDMS Composite Films [J]. Bull. Korean Chem. Soc(S0253-2964). 2001,22(12):1366-1370.
[8] [8] ZHAI Ji-wei,ZHANG Liang-ying,YAO Xi,et al. Characteristics of laser densifled and conventionally heat treated sol-gel derived silica--titania films [J]. Surface and Coatings Technology(S0257-8972),2001,138(2/3):135-140.
[9] [9] LI Ming-tao,TAN Hua,CHEN Lei,et al. Large area direct nanoimprinting of SiO2 –TiO2 gel gratings for optical applications [J]. J. Vac. Sci. Technol. B (S1071-1023),2003,21(2):661-663.
[10] [10] KARASINSK P,TYSZKIEWICZ C,ROGOZINSKI R. Rib waveguides based on the sol-gel derived SiO2:TiO2 films [J]. Photonics Letters of Poland (S2080-2242),2010,2(1):40-42.
[11] [11] CHOI D G,YU H K,YANG S M. 2D nano/micro hybrid patterning using soft/block copolymer lithography [J]. Materials Science and Engineering C(S0928-4931),2004,24(1/2):213-216.
[12] [12] LI Zhi-wei,GU Yan-ni,WANG Lei,et al. Hybrid Nanoimprint Soft Lithography with Sub-15nm Resolution [J]. Nano Letters(S1530-6984),2009,9(6):306-2310.
[14] [14] SIMONE D Z,GIOIA D G,GIOVANNA B,et al. Microlens arrays on large area UV transparent hybrid sol–gel materials for optical tools [J]. Microelectronic Engineering(S0167-9317),2010,87(5/8):1143-1146.
[15] [15] KATHERINE J S,JOEL M H,MIHAEL B,et al. Two-photon absorption cross -sections of common photoinitiators [J]. Journal of Photochemistry and Photobiology A:Chemistry(S1010-6030),2004,162(2/3):497-502.
[16] [16] Stefano Costacurta,Luca Malfatti,Paolo Falcaro. Photocurable silica hybrid organic-inorganic films for photonic applications [J]. J Sol-Gel Technol(S0928-0707),2007,44(1):59-64.
Get Citation
Copy Citation Text
XU Zhen-wu, XU Jian, XU Qing-bo, DONG Jian-feng. Fine Patterning of Optical Waveguide Films Fabricated by Photosensitive Sol-gel Process[J]. Opto-Electronic Engineering, 2011, 38(11): 68
Category:
Received: Jul. 17, 2011
Accepted: --
Published Online: Nov. 18, 2011
The Author Email: Zhen-wu XU (xuzhenwu282@163.com)