Fig. 1. Illustrations of the (a) NTSA [39] and (b) MTAS methods.

Fig. 2. Microscope images of the fabricated (a) ZrO2 and (b) Al2O3 all-dielectric metamaterials. Photographs of (c) the fabrication process and (d) the fabricated ultra-large-scale flexible all-dielectric metamaterial using the MTAS method. (e) Simulated and measured transmissions for ZrO2 and Al2O3 all-dielectric metamaterials. The insets are simulated magnetic field intensity distributions at the corresponding resonance dips in the H–k plane.

Fig. 3. Illustrations of preparation for a touching (a) dimer, (b) trimer, (c) quadrumer, and (d) chain. The upper insets are templates and those below are the resultant metamaterials. (e)–(h) Corresponding fabricated samples.

Fig. 4. Simulated transmissions of dimer all-dielectric metamaterial with different spacings. The insets are the simulated electric field intensities.

Fig. 5. Schematic illustrations of (a) a metallic reflector and (b) an all-dielectric metamaterial reflector. (c) Simulated reflection of the all-dielectric metamaterial with different lattice constants. Calculated effective permittivity and permeability with different lattice constants: (d) P=160  μm, (e) P=120  μm, and (f) P=90  μm. The regions where the effective permittivity and permeability have opposite signs are marked in blue.

Fig. 6. (a) Fabrication process of the broadband terahertz all-dielectric metamaterial reflector based on shrinkable film. Microscope images of the all-dielectric metamaterial (b) before and (c) after HT. (d) Measured reflections of the fabricated terahertz all-dielectric metamaterial before and after HT.