Infrared and Laser Engineering, Volume. 50, Issue 11, 20210070(2021)
Traceable analysis of the performance of an ultra-fine positioning stage using a differential plane mirror interferometer
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Yonggang Yan, Zhengxing Wu, Zhi Li, Yuqi Tang. Traceable analysis of the performance of an ultra-fine positioning stage using a differential plane mirror interferometer[J]. Infrared and Laser Engineering, 2021, 50(11): 20210070
Category: Photoelectric measurement
Received: Jan. 27, 2021
Accepted: --
Published Online: Dec. 7, 2021
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