Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy

Chen Zhang; Yisi Dong; Pengcheng Hu; Haijin Fu; Hongxing Yang; Ruitao Yang; Yongkang Dong; Limin Zou; Jiubin Tan

doi:10.1364/PRJ.525667

Photonics Research, Volume. 12, Issue 9, 1877(2024)

Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy

Chen Zhang^1,2,3, Yisi Dong^1,2,3、*, Pengcheng Hu^1,2,3,5, Haijin Fu^1,2,3, Hongxing Yang^1,2,3, Ruitao Yang^1,2,3, Yongkang Dong^3,4, Limin Zou^1,2, and Jiubin Tan^1,2

Author Affiliations

¹Center of Ultra-precision Optoelectronic Instrument, Harbin Institute of Technology, Harbin 150080, China

²Key Laboratory of Ultra-precision Intelligent Instrumentation, Harbin Institute of Technology, Harbin 150080, China

³Zhengzhou Research Institute, Harbin Institute of Technology, Zhengzhou 450000, China

⁴National Key Laboratory of Science and Technology on Tunable Laser, Harbin Institute of Technology, Harbin 150001, China

⁵e-mail: hupc@hit.edu.cn

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Chen Zhang, Yisi Dong, Pengcheng Hu, Haijin Fu, Hongxing Yang, Ruitao Yang, Yongkang Dong, Limin Zou, Jiubin Tan, "Large-range displacement measurement in narrow space scenarios: fiber microprobe sensor with subnanometer accuracy," Photonics Res. 12, 1877 (2024)

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Paper Information

Category: Instrumentation and Measurements

Received: Apr. 4, 2024

Accepted: Jun. 19, 2024

Published Online: Aug. 16, 2024

The Author Email: Yisi Dong (dongyisi2013@163.com)

DOI:10.1364/PRJ.525667

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology