Journal of Synthetic Crystals, Volume. 50, Issue 2, 302(2021)
Influence of Hydrogen Impurities in the Subsurface of CVD Diamond Films on Surface Activation Reaction
[1] [1] YANG T S, LAI J Y, CHENG C L, et al. Growth of faceted, ballas-like and nanocrystalline diamond films deposited in CH4/H2/Ar MPCVD[J]. Diamond and Related Materials, 2001, 10(12): 2161-2166.
[2] [2] KOLESKE D D, GATES S M, THOMS B D, et al. Hydrogen on polycrystalline diamond films: studies of isothermal desorption and atomic deuterium abstraction[J]. The Journal of Chemical Physics, 1995, 102(2): 992-1002.
[3] [3] ANTHONY T R. Metastable synthesis of diamond[J]. Vacuum, 1990, 41(4/5/6): 1356-1359.
[4] [4] KIMURA K, NAKAJIMA K, YAMANAKA S, et al. Hydrogen depth-profiling in chemical-vapor-deposited diamond films by high-resolution elastic recoil detection[J]. Applied Physics Letters, 2001, 78(12): 1679-1681.
[5] [5] BRIDDON P, JONES R, LISTER G S. Hydrogen in diamond[J]. Journal of Physics C: Solid State Physics, 1988, 21(30): L1027-L1031.
[6] [6] SAADA D, ADLER J, KALISH R. Lowest-energy site for hydrogen in diamond[J]. Physical Review B, 2000, 61(16): 10711.
[7] [7] ARAIDAI M, WATANABE K. Ab initio study of field emission from hydrogen defects in diamond subsurfaces[J]. Applied Surface Science, 2004, 237(1/2/3/4): 483-488.
[8] [8] Liu F B, Cui Y, Qu M, et al. Effects of hydrogen atoms on surface conductivity of diamond film[J]. AIP Advances, 2015, 5(4): 041307.
[9] [9] UPADHYAY A, SINGH A K, KUMAR A. Electronic structure and stability of hydrogen defects in diamond and boron doped diamond: a density functional theory study[J]. Computational Materials Science, 2014, 89: 257-263.
[12] [12] KANAI C, WATANABE K, TAKAKUWA Y. Ab initiocalculations on etching of graphite and diamond surfaces by atomic hydrogen[J]. Physical Review B, 2001, 63(23): 235311.
[13] [13] LIU X J, QIAO H M, KANG C J, et al. Adsorption and migration behavior of Si atoms on the hydrogen-terminated diamond (001) surface: a first principles study[J]. Applied Surface Science, 2017, 420: 542-549.
[15] [15] YAROVSKY I, GOLDBERG A. DFT study of hydrogen adsorption on Al13 clusters[J]. Molecular Simulation, 2005, 31(6/7): 475-481.
[16] [16] LIU X J, SUN H F, WU Y Z, et al. Theoretical study of sulphur atoms’ adsorption and migration behaviors on diamond (001) surface[J]. Coatings, 2019, 9(3): 184.
[17] [17] MA Y D, JIN H, DAI Y, et al. Study of ammonia molecule adsorbing on diamond (100) surface[J]. Applied Surface Science, 2010, 256(13): 4136-4141.
[18] [18] MEHANDRU S P, ANDERSON A B, ANGUS J C. Hydrogen binding and diffusion in diamond[J]. Journal of Materials Research, 1992, 7(3): 689-695.
[19] [19] REN Y, MA X Y, QI Z H, et al. Effect of H defects on Li transport during the deposition process on an H-diamond surface: a first-principles calculation analysis[J]. Advanced Theory and Simulations, 2020, 3(8): 2000067.
[20] [20] LIU X J, WANG H C, LU P F, et al. First principles calculations of the adsorption and migration behaviors of N atoms on the H-terminated diamond (001) surface[J]. Applied Surface Science, 2019, 463: 668-678.
[22] [22] STIEGLER J, LANG T, VON KAENEL Y, et al. Activation energy for diamond growth from the carbon-hydrogen gas system at low substrate temperatures[J]. Applied Physics Letters, 1997, 70(2): 173-175.
[23] [23] HAYASHI K, YAMANAKA S, WATANABE H, et al. Investigation of the effect of hydrogen on electrical and optical properties in chemical vapor deposited on homoepitaxial diamond films[J]. Journal of Applied Physics, 1997, 81(2): 744-753.
Get Citation
Copy Citation Text
JIAN Xiaogang, TANG Jinyao, MA Qianli, HU Jibo, YIN Mingrui. Influence of Hydrogen Impurities in the Subsurface of CVD Diamond Films on Surface Activation Reaction[J]. Journal of Synthetic Crystals, 2021, 50(2): 302
Category:
Received: Nov. 17, 2020
Accepted: --
Published Online: Mar. 30, 2021
The Author Email: Xiaogang JIAN (jianxgg@tongji.edu.cn)
CSTR:32186.14.