[3] [3] LYU Jianguo, WANG Lei, YE Zhizhen. Development and application for ZnO thin films［J］.Piezoelectrics & Acoustooptics,2002,24(6):463-467.

[4] [4] MA Zhanhong, REN Fengzhang, MING Xiaoli, et al. Cu-doped ZnO electronic structure and optical properties studied by first-principles calculations and experiments［J］.Materials,2019,12(1):196-208.

[5] [5] LI Lin, YANG Haiying, YANG Ping. Lutetium-doped ZnO to improve photovoltaic performance:A first-principles study［J］.ACS Appl Electron Mater,2022,4(12):6253-6260.

[7] [7] YANG Ping, ZHAO Yanfang, YANG Haiying. Investigation on optoelectronic performances of Al,N codoped ZnO:First-principles method［J］.Ceramics International,2015,41(2):2446-2452.

[8] [8] HE Jingfang, ZHENG Shukai, ZHOU Pengli, et al. First-principles calculations on the electronic and optical properties of ZnO codoped with Cu-Co［J］.Acta Phys Sin,2014,63(4):046301.

[9] [9] JIN Xilian, LOU Shiyun, KONG Deguo, et al. Investigation on the broadening of band gap of wurtzite ZnO by Mg-doping［J］.Acta Phys Sin,2006,55(9):4809-4814.

[10] [10] GOPAL P, SPALDIN N A. Polarization, piezoelectric constants, and elastic constants of ZnO, MgO and CdO［J］.Journal of Electronic Materials,2006,35(4):538-542.

[11] [11] NIN Haibo, CHEN Guangde, ZHU Youzhang, et al. Influence of oxygen vacancies on the spontaneous polarisation and piezoelectricity of ZnO:A first-principles study［J］.International Journal of Nanomanufacturing,2019,15(4):369-380.

[12] [12] CHEN Yiju, SANJAYA B, LIU Chuanpu, et al. Enhancement of the piezoelectric coefficient in hexagonal MgxZn1-xO films at lower Mg compositions［J］.Journal of Alloys and Compounds,2017,728(25):1248-1253.

[13] [13] CHEN Hsinhung, SANJAYA B, LIU Chuanpu, et al. Microstructure and piezoelectric properties of hexagonal MgxZn1-xO/ZnO films at lower Mg compositions［J］.Thin Solid Films,2019,690(30):137459.

[14] [14] MOMIDA H, OGUCHI T. Effects of lattice parameters on piezoelectric constants in wurtzite materials:A theoretical study using rst-principles and statistical-learning methods［J］.Applied Physics Express,2018,11(4):041201.