Self-Aligned Superconducting Nanowire Single Photon Detector

Rongxin Geng; Hao Li; Jia Huang; Peng Hu; You Xiao; Huiqin Yu; Lixing You

doi:10.3788/LOP202158.1011022

Laser & Optoelectronics Progress, Volume. 58, Issue 10, 1011022(2021)

Self-Aligned Superconducting Nanowire Single Photon Detector

Rongxin Geng^1,2,3, Hao Li^1,2,4、*, Jia Huang^1,2, Peng Hu^1,2,3, You Xiao^1,2,3, Huiqin Yu^1,2, and Lixing You^1,2、**

¹State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, 200050, China

²Center for Excellence in Superconducting Electronics, Chinese Academy of Sciences, Shanghai, 200050, China

³University of Chinese Academy of Sciences, Beijing, 100049, China

⁴Key Laboratory of Space Active Opto-Electronics Technology,Chinese Academy of Sciences, Shanghai, 200050, China

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Figures & Tables(9)

Fig. 1. SEM image of nanowire structure

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Fig. 2. SEM image of sidewall etched by deep silicon

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Fig. 3. Self-aligned SNSPD chip. (a) Tape-out product of self-aligned device; (b) model of single chip

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Fig. 4. Photograph of self-aligned SNSPD

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Fig. 5. Deviation of light spot relative to center of photosensitive area of device

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Fig. 6. Schematic diagram of SNSPD test system

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Fig. 7. Variation curves of SDE and DCR with bias current

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Table 1. Experimental results under the condition of repeated temperature rise and fall
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Table 1. Experimental results under the condition of repeated temperature rise and fall
Times Result /%
No.1 No.2 No.3 No.4
1 87.00 86.20 80.40 81.20
2 86.40 85.80 80.80 81.90
3 86.40 86.40 81.00 82.00
4 87.30 87.10 80.20 81.60
Average value 86.78 86.38 80.60 81.68
Standard deviation 0.45 0.54 0.37 0.36

Table 2. Experiment results under the condition of repeated insertion and extraction of optical fibers
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Table 2. Experiment results under the condition of repeated insertion and extraction of optical fibers
Times Result /%
No.1 No.2 No.3 No.4
1 68.60 80.10 79.10 82.90
2 65.80 80.40 77.00 84.50
3 66.80 85.20 75.00 81.70
4 65.90 86.40 78.10 84.30
Average value 66.78 83.03 77.30 83.35
Standard deviation 1.30 3.24 1.76 1.31

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Rongxin Geng, Hao Li, Jia Huang, Peng Hu, You Xiao, Huiqin Yu, Lixing You. Self-Aligned Superconducting Nanowire Single Photon Detector[J]. Laser & Optoelectronics Progress, 2021, 58(10): 1011022

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Paper Information

Category: Imaging Systems

Received: Jan. 18, 2021

Accepted: Mar. 15, 2021

Published Online: May. 28, 2021

The Author Email: Hao Li (lihao@mail.sim.ac.cn), Lixing You (lxyou@mail.sim.ac.cn)

DOI:10.3788/LOP202158.1011022

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Experimental results under the condition of repeated temperature rise and fall

Table 1. Experimental results under the condition of repeated temperature rise and fall

Table 2. Experiment results under the condition of repeated insertion and extraction of optical fibers

Table 2. Experiment results under the condition of repeated insertion and extraction of optical fibers