Fig. 1. System of picosecond pulse laser at 266 nm; (a) All-solid-state SESAM mode-locked Nd∶YVO₄ laser oscillator; (b) Nd∶YVO₄ picosecond regenerative amplifier; (c) fourth harmonic generation at 266 nm deep ultraviolet laser

Fig. 2. Results of the 1064 nm seed laser oscillator. (a) Output power (inset: laser wavelength); (b) pulse trains; (c) fundamental frequency spectrum (inset: spectrum within the 1 GHz range); (d) pulse width

Fig. 3. Output characteristics regenerative amplifier. (a) Pulse amplification process with a repetition rate of 200 kHz; (b) pulse sequence with a repetition rate at 200 kHz; (c) average output power with the increase of pump power

Fig. 4. Pulse width of regenerative amplifier

Fig. 5. Laser spectra of Nd∶YVO₄ oscillator and regenerative amplifier

Fig. 6. Output power and conversion efficiency of the achieved 532 nm green laser (inset: its typical beam spot)

Fig. 7. Pulse width of the 532 nm green laser

Fig. 8. M² measurement of the 532 nm green laser beam quality (inset: typical beam spot)

Fig. 9. Output power of the 266 nm deep ultraviolet laser (insets: laser wavelength and elliptical beam spot)