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Laser & Optoelectronics Progress, Volume. 61, Issue 19, 1913022(2024)

Integrated Polarization Optical Sensor Based on Dielectric Metasurface

Jinkui Chu*, Jiaxin Fu, and Jianying Liu
Author Affiliations
  • School of Mechanical Engineering, Dalian University of Technology, Dalian 116023, Liaoning , China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
    Equations (4)
    References (32)
    Cited By (1)
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    Figures & Tables(11)
    Physical object and cross-sectional diagram of polarization optical sensor based on dielectric metasurface

    Fig. 1. Physical object and cross-sectional diagram of polarization optical sensor based on dielectric metasurface

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    Principle diagram of dielectric metasurface

    Fig. 2. Principle diagram of dielectric metasurface

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    Optical path design of double-layer field diaphragm

    Fig. 3. Optical path design of double-layer field diaphragm

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    Physical image and SEM image of dielectric metasurface

    Fig. 4. Physical image and SEM image of dielectric metasurface

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    Production process flow diagram of double-layer field diaphragm

    Fig. 5. Production process flow diagram of double-layer field diaphragm

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    Double-layer field diaphragm and its alignment effect. (a) Lower diaphragm; (b) upper diaphragm;

    Fig. 6. Double-layer field diaphragm and its alignment effect. (a) Lower diaphragm; (b) upper diaphragm;

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    Microscope-based alignment platform and alignment effect. (a) Alignment platform; (b) before and after alignment

    Fig. 7. Microscope-based alignment platform and alignment effect. (a) Alignment platform; (b) before and after alignment

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    Full Stokes parameter measuring device of polarization optical sensor

    Fig. 8. Full Stokes parameter measuring device of polarization optical sensor

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    Polarization angle error curves of three channels before and after compensation. (a) 0°; (b) X30°; (c) Y30°

    Fig. 9. Polarization angle error curves of three channels before and after compensation. (a) 0°; (b) X30°; (c) Y30°

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    • Table 1. Relevant dimensional parameters of double-layer field diaphragm

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      Table 1. Relevant dimensional parameters of double-layer field diaphragm

      Known parameterValueDiaphragm aperture（Length， Width）Hole offsetValue /mm
      f /μm340D0， up（0.326 mm， 0.266 mm）M0， up0
      L0 /mm0.5D0， low（0.209 mm， 0.149 mm）M0， low0
      L1 /mm2Dx， up（0.326 mm， 0.270 mm）Mx， up0.884
      φ /（°）5Dx， low（0.209 mm， 0.150 mm）Mx， low0.177
      Px /mm0.9Dy， up（0.330 mm， 0.266 mm）My， up0.884
      Py /mm1.2Dy， low（0.210 mm， 0.149 mm）My， low0.177

    • Table 2. Normalized Stokes parameter measurement results

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      Table 2. Normalized Stokes parameter measurement results

      Type of polarized lightTheoretical value （s1，s2，s3）Direction
      0°X30°Y30°
      0°LP（1， 0， 0）（0.957，0.054，0.061）（0.944，0.023，-0.092）（0.949，0.025，-0.130）
      90°LP（-1， 0， 0）（-0.974，0.003，0.093）（-0.965，-0.006，0.121）（-0.973，0.034，0.125）
      45°LP（0， 1， 0）（0.024，0.969，-0.071）（-0.020，0.996，0.093）（-0.026，0.978，0.042）
      135°LP（0， -1， 0）（-0.002，-0.978，0.087）（-0.008，-0.982，0.089）（0.018，-0.997，-0.061）
      RCP（0， 0， 1）（0.097，-0.058，0.975）（0.036，-0.053，0.887）（0.020，-0.013，0.859）
      LCP（0， 0， -1）（-0.011，0.052，-0.972）（-0.093，0.017，-0.896）（-0.014，0.039，-0.943）
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    Jinkui Chu, Jiaxin Fu, Jianying Liu. Integrated Polarization Optical Sensor Based on Dielectric Metasurface[J]. Laser & Optoelectronics Progress, 2024, 61(19): 1913022

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    Paper Information

    Category: Integrated Optics

    Received: Jan. 10, 2024

    Accepted: Mar. 12, 2024

    Published Online: Oct. 15, 2024

    The Author Email: Jinkui Chu (chujk@dlut.edu.cn)

    DOI:10.3788/LOP240495

    CSTR:32186.14.LOP240495

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology