[1] [1] Xu Deyan, Wang Qing, Gao Zhishan et al.. Current Optical Elements Testing and International Standards［M］. Beijing: Science Press, 2009, 1～20

[2] [2] Miao Erlong, Zhang Jian, Gu Yongqiang et al.. Measurement error analysis of high precision fizeau interferometer for lithography projection objective［J］. Chinese J. Lasers, 2010, 37(8): 2029～2034

[3] [3] J. Schmit, K. Creath, M. Kujawinska. Spatial and temporal phase-measurement techniques: a comparison of major error sources in one-dimension［C］. SPIE, 1992, 1755: 202～211

[4] [4] J. Schwider, R. Burow, K. E. Elssner et al.. Digital wavefront measuring interferometry: some systematic error sources［J］. Appl. Opt., 1983, 22(21): 3421～3432

[5] [5] K. Creath. Phase-measurement interferometry: Beware these errors［C］. SPIE, 1991, 1553: 213～220

[6] [6] Xing Tingwen, He Guoliang, Shu Liang. Measurement errors in the 193 nm phase-shifting point diffraction interferometer［J］. Opto-Electronic Engineering, 2009, 36(2): 67～72

[7] [7] Ma Qiang, Liu Weiqi, Li Xiangbo et al.. Analysis of diffraction wavefront error in point diffraction interferometer［J］. Acta Optica Sinica, 2008, 28(12): 2321～2324

[8] [8] Liu Dong, Yang Yongying, Tian Chao et al.. Analysis and correction of retrace error for nonull aspheric testing［J］. Acta Optica Sinica, 2009, 29(3): 688～696

[9] [9] Xu Rongwei, Liu Liren, Liu Hongzhan et al.. Support schemes and thermal effect s analyses of large aperture interferometer mirrors［J］. Acta Optica Sinica, 2005, 25(6): 809～815

[10] [10] Wu Qingwen, Lu E, Wang Jiaqi et al.. Study on the surface figure changes of primary mirror centerally supported under gravity load［J］. Opt. & Precision Engng., 1996, 4(4): 23～28

[11] [11] Zhang Dejiang, Liu Liren, Xu Rongwei et al.. Finite element analysis for wavefront error of lenses induced by gravity［J］. Acta Optica Sinica, 2005, 25(4): 538～541

[12] [12] Wu Xuhua, Chen Lei, Wang Lei. Design and test of reference mirror in Φ300 mm interferometer［J］. Opt. & Precision Engng., 2007, 15(8): 1235～1240

[13] [13] Li Fu, Ruan Ping, Zhao Baochang. Study on the surface deformation of flat reflector under gravity load［J］. Acta Photonica Sinica, 2005, 34(2): 272～275

[14] [14] P. A. Coronato, R. C. Juergens. Transferring FEA results to optics codes with Zernikes: review of techniques［C］. SPIE, 2003, 5176: 1～8