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Chinese Journal of Lasers, Volume. 49, Issue 2, 0202007(2022)

Influences of Laser Etching on Optical and Electrical Properties of Ag/FTO/AZO Thin Films

Yunlong Zhou1, Min Lei1, Chenlin Wang1, Qian Xu1, Baojia Li1,2、*, and Lijing Huang2,3、**
Author Affiliations
  • 1School of Material Science and Engineering, Jiangsu University, Zhenjiang, Jiangsu 212013, China
  • 2Institute of Micro-nano Optoelectronic and Terahertz Technology, Jiangsu University, Zhenjiang, Jiangsu 212013, China
  • 3School of Mechanical Engineering, Jiangsu University, Zhenjiang, Jiangsu 212013, China
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    SEM images of thin films. (a) AZO film；(b) as-prepared Ag/FTO/AZO multilayer film

    Fig. 1. SEM images of thin films. (a) AZO film；(b) as-prepared Ag/FTO/AZO multilayer film

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    SEM images of Ag/FTO/AZO multilayer films under different laser energy densities. (a) 0.1 J/cm2; (b) 0.3 J/cm2; (c) 0.7 J/cm2; (d) 1.3 J/cm2; (e) 2.1 J/cm2

    Fig. 2. SEM images of Ag/FTO/AZO multilayer films under different laser energy densities. (a) 0.1 J/cm2; (b) 0.3 J/cm2; (c) 0.7 J/cm2; (d) 1.3 J/cm2; (e) 2.1 J/cm2

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    Heights of laser-etched grating structures on Ag/FTO/AZO multilayer films under different laser energy densities

    Fig. 3. Heights of laser-etched grating structures on Ag/FTO/AZO multilayer films under different laser energy densities

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    XRD patterns of different films

    Fig. 4. XRD patterns of different films

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    Transmittance spectra of different films

    Fig. 5. Transmittance spectra of different films

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    Average transmittance values (400800 nm) of different films

    Fig. 6. Average transmittance values (400800 nm) of different films

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    Reflectance spectra of different films

    Fig. 7. Reflectance spectra of different films

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    Average reflectances (400800 nm) of different films

    Fig. 8. Average reflectances (400800 nm) of different films

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    Sheet resistances of different films

    Fig. 9. Sheet resistances of different films

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    Figure-of-merits of different films

    Fig. 10. Figure-of-merits of different films

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    Yunlong Zhou, Min Lei, Chenlin Wang, Qian Xu, Baojia Li, Lijing Huang. Influences of Laser Etching on Optical and Electrical Properties of Ag/FTO/AZO Thin Films[J]. Chinese Journal of Lasers, 2022, 49(2): 0202007

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    Paper Information

    Category: laser manufacturing

    Received: May. 26, 2021

    Accepted: Jul. 8, 2021

    Published Online: Dec. 30, 2021

    The Author Email: Baojia Li (li_bjia@126.com), Lijing Huang (lij_huang@126.com)

    DOI:10.3788/CJL202249.0202007

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology