Chinese Journal of Lasers, Volume. 38, Issue 9, 908003(2011)

Analysis of PointDiffraction Wavefront Error Based on Finite Difference Time Domain Method

Chen Chen*, Yang Yongying, Wang Daodang, and Zhuo Yongmo
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    References(18)

    [1] [1] R. N. Smartt, W. H. Steel. Theory and application of pointdiffraction interferometers[J]. Jpn. J. Appl. Phys., 1975, 14(suppl.141): 351~356

    [2] [2] G. Y. Wang, Y. L. Zheng, A. M. Sun et al.. Polarization pinhole interferometer[J]. Opt. Lett., 1991, 16(17): 1352~1354

    [3] [3] Q. Gong, J. M. Geary. Modeling point diffraction interferometers[J]. Opt. Engng., 1996, 35(2): 351~356

    [4] [4] Q. Gong, W. Eichhorn. Alignment and testing of piston and aberrations of a segmented mirror[C]. SPIE, 2005, 5869: 273~282

    [5] [5] J. E. Millerd, S. J. Martinek, N. J. Brock et al.. Instantaneous phaseshift pointdiffraction interferometer[C]. SPIE, 2004, 5380: 422~429

    [6] [6] R. M. Neal, J. C. Wyant. Polarization phaseshifting pointdiffraction interferometer[J]. Appl. Opt., 2006, 45(15): 3463~3476

    [7] [7] P. Naulleau, K. A. Goldberg, S. H. Lee et al.. The EUV phaseshifting point diffraction interferometer[C]. AIP Conf. Proc., 2000. 66~72

    [8] [8] P. Naulleau, K. A. Goldberg, S. H. Lee et al.. Characterization of the accuracy of EUV phaseshifting point diffraction interferometry[C]. SPIE, 1998, 3331: 114~123

    [10] [10] Deng Xiaojiu, Li Huanlong, Liu Caixia et al.. A comparative study of vectorial diffraction theories and the validity of scalar approximation[J]. Chin. J. Quantum Electron., 2007, 24(5): 543~547

    [11] [11] K. Otaki, Y. Zhu, M. Ishii et al.. Rigorous wavefront analysis of visiblelight point diffraction interferometer for EUVL[C]. SPIE, 2004, 5193: 182~190

    [14] [14] K. A. Goldberg, E. Tejnil, J. Bokor. A 3D numerical study of pinhole diffraction to predict the accuracy of EUV point diffraction interferometry[J]. Vol.4 to OSA Trends in Optics and Photonics, 1996. 133~137

    [15] [15] Yoshiyuki Sekine, Akiyoshi Suzuki, Masanobu Hasegawa et al.. Wavefront errors of reference spherical waves in high-numerical aperture point diffraction interferometers[J]. J. Vac. Sci. Technol. B, 2004, 22(1): 104~108

    [16] [16] J. A. Kong. Electromagnetic Wave Theory[M]. New York: John Wiley & Sons, 1986. 380~382

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    Chen Chen, Yang Yongying, Wang Daodang, Zhuo Yongmo. Analysis of PointDiffraction Wavefront Error Based on Finite Difference Time Domain Method[J]. Chinese Journal of Lasers, 2011, 38(9): 908003

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    Paper Information

    Category: measurement and metrology

    Received: Feb. 24, 2011

    Accepted: --

    Published Online: Aug. 19, 2011

    The Author Email: Chen Chen (chenchentz@gmail.com)

    DOI:10.3788/cjl201138.0908003

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