Chinese Journal of Lasers, Volume. 38, Issue 9, 908003(2011)
Analysis of PointDiffraction Wavefront Error Based on Finite Difference Time Domain Method
The dimension of pinhole affects the error of diffraction wavefront, which is the critical element that determines the precision of point diffraction interferometer (PDI). The deviation of diffracted wavefront from an ideal sphere at visible wavelength, which is aroused by the dimension of the pinhole, is numerically analyzed based on the finite difference time domain (FDTD) method. The simulation results show that the peaktovalley (PV) value of diffraction wavefront error is less than 1 nm and the root mean square (RMS) value is less than 0.35 nm when the diameter of pinhole is 400 nm and numerical aperture (NA) is 0.65. The high precision of testing spherical surfaces with high NA is demonstrated. The analysis of pointdiffraction wavefront error with FDTD method provides theoretical basis for choosing the dimension of pinhole in experiments and tests with PDI.
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Chen Chen, Yang Yongying, Wang Daodang, Zhuo Yongmo. Analysis of PointDiffraction Wavefront Error Based on Finite Difference Time Domain Method[J]. Chinese Journal of Lasers, 2011, 38(9): 908003
Category: measurement and metrology
Received: Feb. 24, 2011
Accepted: --
Published Online: Aug. 19, 2011
The Author Email: Chen Chen (chenchentz@gmail.com)