Acta Optica Sinica, Volume. 3, Issue 6, 541(1983)
The stresses and photoelastic effects in GaAs GaAlAs multilayer wafers with masked and selective thermal oxidation structure
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LIU HONGDU, FENG ZHECHUAN, GUO CHANGZI. The stresses and photoelastic effects in GaAs GaAlAs multilayer wafers with masked and selective thermal oxidation structure[J]. Acta Optica Sinica, 1983, 3(6): 541
Paper Information
Category: Materials
Received: Jan. 6, 1982
Accepted: --
Published Online: Sep. 15, 2011
The Author Email:
CSTR:32186.14.
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