Opto-Electronic Engineering, Volume. 39, Issue 10, 54(2012)
The Analysis of Phase-only Matched Filtering and Application on Projection Lithography
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LEI Liang, OUYANG Qin, SHI Ying. The Analysis of Phase-only Matched Filtering and Application on Projection Lithography[J]. Opto-Electronic Engineering, 2012, 39(10): 54
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Received: Jan. 20, 2012
Accepted: --
Published Online: Nov. 22, 2012
The Author Email: Liang LEI (leiliang@gdut.edu.cn)
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