Influence of Accelerator Grid Voltage on Grid Performance of Dual Stage Ion Optical System

Lianjun Jia; Tianping Zhang; Mingzheng Liu; Juanjuan Chen; Yanhui Jia

doi:10.3788/LOP55.051202

Laser & Optoelectronics Progress, Volume. 55, Issue 5, 051202(2018)

Influence of Accelerator Grid Voltage on Grid Performance of Dual Stage Ion Optical System

Lianjun Jia^*, Tianping Zhang, Mingzheng Liu, Juanjuan Chen, and Yanhui Jia

Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou, Gansu 730000, China

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Figures & Tables(12)

Fig. 1. Calculation area and boundary conditions

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Fig. 2. Flow chart of simulation calculation

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Fig. 3. Equipotential line graph under different accelerator grid voltages. (a) -150 V; (b) -180 V; (c) -200 V;(d) -250 V; (e) -300 V

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Fig. 4. Space position distribution of beam ions. (a) -300 V; (b) -250 V; (c) -200 V; (d) -180 V; (e) -150 V

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Fig. 5. Effect of accelerator grid voltage on beam divergence angle

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Fig. 6. Effect of accelerator grid voltage on impingement CEX ion number. (a) -150 V; (b) -180 V; (c) -200 V; (d) -250 V; (e) -300 V

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Fig. 7. Effect of acceleration grid voltage on impingement CEX ion current. (a) Wall of hole; (b) upstream and downstream surface of accelerator grid

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Fig. 8. (a) Sputtering yield and (b) sputtering rate under different accelerator grid voltages

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Fig. 9. Beam flow photo with the accelerator grid voltage of -250 V

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Table 1. Screen grid geometrical parameters and beam current of duel stage accelerating ion optical system
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Table 1. Screen grid geometrical parameters and beam current of duel stage accelerating ion optical system
Screen grid apertureradius /mm Extraction grid apertureradius /mm Extraction stagegap /mm Accelerator grid apertureradius /mm Beamcurrent /mA
1.0 0.7 1.0 0.7 100

Table 2. Operating parameters of duel stage accelerating ion thruster
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Table 2. Operating parameters of duel stage accelerating ion thruster
Screengrid voltage /V Extractiongrid voltage /V Accelerator gridvoltage /V Anode propellant massflow rate /(mg·s^-1) Cathodes propellant massflow rate /(mg·s^-1)
6820 4820 -150, -180, -200,-250, -300 0.2 0.05

Table 3. Simulation results of acceleration grid impingement CEX ion in the hole wall
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Table 3. Simulation results of acceleration grid impingement CEX ion in the hole wall
Accelerator gridvoltage /V Impingement CEXion number CEX ion averageenergy /eV Percent of CEX ion with energyover 1 keV /%
-150 27749 506 15.6
-180 28051 505 15.3
-200 28176 504 15.3
-250 27815 504 15.1
-300 29764 508 16.0

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Lianjun Jia, Tianping Zhang, Mingzheng Liu, Juanjuan Chen, Yanhui Jia. Influence of Accelerator Grid Voltage on Grid Performance of Dual Stage Ion Optical System[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051202

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Paper Information

Category: Instrumentation, measurement, and metrology

Received: Nov. 8, 2017

Accepted: --

Published Online: Sep. 11, 2018

The Author Email: Lianjun Jia (jlj1323962@126.com)

DOI:10.3788/LOP55.051202

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Screen grid geometrical parameters and beam current of duel stage accelerating ion optical system

Table 1. Screen grid geometrical parameters and beam current of duel stage accelerating ion optical system

Table 2. Operating parameters of duel stage accelerating ion thruster

Table 2. Operating parameters of duel stage accelerating ion thruster

Table 3. Simulation results of acceleration grid impingement CEX ion in the hole wall

Table 3. Simulation results of acceleration grid impingement CEX ion in the hole wall