Fig. 1. Brief progress on the scale of InGaAs single-photon detector arrays at home and abroad

Fig. 2. Typical packaging forms of InGaAs single-photon detector^[22]. (a) Coaxial packaging; (b) dual in-line packaging; (c) pin grid array packaging

Fig. 3. APD dark current test curves. (a) Relationship between DCR and temperature^[22]; (b) relationship between DCR and activation energy of InGaAs SPAD device^[27]

Fig. 4. Equivalent circuit models of chip and socket^[33]. (a) Chip; (b) socket

Fig. 5. SPAD packaging with integrated balancing capacitor and cooling^[35]

Fig. 6. Electromagnetic field distributions of coplanar waveguide and coaxial line^[28]. (a) Coplanar waveguide; (b) coaxial line

Fig. 7. Schematic diagram of the temperature control module^[3]

Fig. 8. Alignment methods of chip and microlens. (a) Image of alignment key and cross mark on microlens^[38]; (b) image of alignment key and cross mark on the detector^[38]; (c) schematic diagram of the chip and microlens alignment system^[22]

Fig. 9. Schematic diagram of the optical system and its coupling efficiency curves^[40]. (a) Schematic diagram of the optical system; (b) coupling efficiency curve of 105 μm/0.22 NA MMF with 100 μm diameter active region; (c) coupling efficiency curve of SMF28 with 25 μm diameter active region

Fig. 10. V-groove limit structure^[43]

Fig. 11. Schematic diagram of passive coupling^[44]

Fig. 12. Mounting schemes of the detector chip^[45]. (a) Horizontal coupling; (b) vertical coupling