[1] [1] BALASUNDARAPRABHU R, MONAKHOV E V, MUTHUKUMARASAMY N, et al. Effect of heat treatment on ITO film properties and ITO/p-Si interface［J］. Materials Chemistry and Physics, 2009, 114(1): 425-429.

[2] [2] YEO L Y, FRIEND J R. Surface acoustic wave microfluidics［J］. Annual Review of Fluid Mechanics, 2014, 46(1): 379-406.

[3] [3] KOIS J, GUREVITS J, BEREZNEV S, et al. CdSe nanofiber and nanohorn structures on ITO substrates fabricated by electrochemical deposition［J］. Applied Surface Science, 2013, 283: 982-985.

[4] [4] ALEKSANDROVA M, KURTEV N, VIDEKOV V, et al. Material alternative to ITO for transparent conductive electrode in flexible display and photovoltaic devices［J］. Microelectronic Engineering, 2015, 145: 112-116.

[5] [5] ZHONG Z Y, JIANG Y D. Surface modification and characterization of indium-tin oxide for organic light-emitting devices［J］. Journal of Colloid and Interface Science, 2006, 302(2): 613-619.

[6] [6] DAI L, CHEN X L, JIAN J K, et al. Fabrication and characterization of In2O3 nanowires［J］. Applied Physics A, 2002, 75(6): 687-689.

[7] [7] ZHANG W, ZHU G S, ZHI L, et al. Structural, electrical and optical properties of indium tin oxide thin films prepared by RF sputtering using different density ceramic targets［J］. Vacuum, 2012, 86(8): 1045-1047.

[8] [8] CHO H, YUN Y H. Characterization of indium tin oxide (ITO) thin films prepared by a sol-gel spin coating process［J］. Ceramics International, 2011, 37(2): 615-619.

[9] [9] ILJINAS A, MOCKEVICˇIUS I, ANDRULEVICˇIUS M, et al. Growth of ITO thin films by magnetron sputtering: OES study, opticaland electrical properties［J］. Vacuum, 2009, 83: S118-S120.

[10] [10] RAJ E S, CHOY K L. Microstructure and properties of indium tin oxide films produced by electrostatic spray assisted vapour deposition process［J］. Materials Chemistry and Physics, 2003, 82(2): 489-492.

[11] [11] KHONDOKER M A H, YANG S Y, MUN S C, et al. Flexible and conductive ITO electrode made on cellulose film by spin-coating［J］. Synthetic Metals, 2012, 162(21/22): 1972-1976.

[12] [12] UMEMOTO Y, SCHAFF W J, PARK H, et al. Effect of thermionic-field emission on effective barrier height lowering in In0.52Al0.48As Schottky diodes［J］. Applied Physics Letters, 1993, 62(16): 1964-1966.

[17] [17] TERZINI E, THILAKAN P, MINARINI C. Properties of ITO thin films deposited by RF magnetron sputtering at elevated substrate temperature［J］. Materials Science and Engineering: B, 2000, 77(1): 110-114.

[18] [18] DE S, KING P J, LYONS P E, et al. Size effects and the problem with percolation in nanostructured transparent conductors［J］. ACS Nano, 2010, 4(12): 7064-7072.

[19] [19] BEENA D, LETHY K J, VINODKUMAR R, et al. Influence of substrate temperature on the properties of laser ablated indium tin oxide films［J］. Solar Energy Materials and Solar Cells, 2007, 91(15/16): 1438-1443.

[20] [20] BURSTEIN E. Anomalous optical absorption limit in InSb［J］. Physical Review, 1954, 93(3): 632.

[21] [21] KAMATH A, DEVENDRAPPA H. Concentration-dependent ionic conductivity and dielectric relaxation of methyl blue-dyed polyethylene oxide films［J］. Polymer Bulletin, 2015, 72(10): 2705-2724.

[22] [22] NAGAR S, CHAKRABARTI S. Effect of substrate temperature on the electrical and optical properties of pulsed laser deposited ZnO thin films［J］. Sensor Letters, 2013, 11(8): 1498-1503.

[23] [23] LEE W S, CHOI G W, SEO Y J. Surface planarization of ZnO thin film for optoelectronic applications［J］. Microelectronics Journal, 2009, 40(2): 299-302.

[25] [25] LI Y, ZHAO G Y, ZHI X, et al. Microfabrication and imaging XPS analysis of ITO thin films［J］. Surface and Interface Analysis, 2007, 39(9): 756-760.

[26] [26] KIM D, KIM S. AFM observation of ITO thin films deposited on polycarbonate substrates by sputter type negative metal ion source［J］. Surface and Coatings Technology, 2003, 176(1): 23-29.

[27] [27] LI J F, SONG Q, SHI W B, et al. Atomic force microscopy and X-ray photoelectron spectroscopy study on the surface and interface states of Liq and ITO films［J］. Advanced Materials Research, 2010, 152/153: 566-571.