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Chinese Journal of Lasers, Volume. 14, Issue 10, 635(1987)

Laser enhanced copper plating

Yuan Jiayong, Li Shijie, Wang Jinghuan, Wang Maoxin, Qin Liang, and Chen Qi
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    [1] [1] E. J. Von Gutfeld et al., IBM J. Bes. Develop 1982, 26, 136.

    [2] [2] E. J. Von Gutfeld et al.; Appl. Phys. Lett., 1983 43, 876.

    [3] [3] E. J. Von Gutfeld et al., Appl. Phys. Lett., 1979, 35, 651.

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    Yuan Jiayong, Li Shijie, Wang Jinghuan, Wang Maoxin, Qin Liang, Chen Qi. Laser enhanced copper plating[J]. Chinese Journal of Lasers, 1987, 14(10): 635

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    Paper Information

    Category: laser devices and laser physics

    Received: May. 29, 1986

    Accepted: --

    Published Online: Aug. 10, 2012

    The Author Email:

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology