Acta Optica Sinica, Volume. 34, Issue 4, 431001(2014)
Optical Character Study of Silicon Optical Films in Different Deposited Temperature
[2] [2] Shu Xiongwen, Xu Chen, Tian Zengxia, et al.. Pross investigation of electron beam evaporation deposited amorphous silicon optical films [J]. J Optoelectonics·Laser, 2006, 17(8): 905-908.
[3] [3] Haihan Luo, Dingquan Liu, Yin Xin. Influencing on the microstructure and surface morphology of Ge and Si thin films [C]. SPIE, 2012, 8416: 84160V.
[4] [4] Tang Jinfa, Gu Peifu, Liu Xu, et al.. Modern Optical Thin Film Technology [M]. Hangzhou: Zhejiang University Press, 2006. 403-411.
[5] [5] Gu Peifu. Thin Film Technology [M]. Hangzhou: Zhejiang University Press, 1990. 78.
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Luo Haihan, Cai Qingyuan, Li Yaopeng, Liu Dingquan. Optical Character Study of Silicon Optical Films in Different Deposited Temperature[J]. Acta Optica Sinica, 2014, 34(4): 431001
Category: Thin Films
Received: Oct. 8, 2013
Accepted: --
Published Online: Mar. 25, 2014
The Author Email: Haihan Luo (haihan.luo@mail.sitp.ac.cn)